Polymer jet printing of SU-8 micro-dot patterns on Si surface: Optimization of tribological properties

Tribology Letters

Volumn 42, Issue 2, 2011, Pages 215-222

  Tay, Nam Beng ^a   Minn, Myo ^a   Sinha, Sujeet K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Micro patterning; SU 8; Tribology

Indexed keywords

BALL-ON-DISK; COEFFICIENT OF FRICTIONS; CONTACT AREAS; DURABILITY TEST; JET PRINTING; MICRO PATTERNING; NORMAL FORCES; NORMAL LOADS; PERFLUOROPOLYETHERS; SI SUBSTRATES; SI SURFACES; SLIDING TEST; SLIDING VELOCITIES; SU-8; TRIBOLOGICAL PROPERTIES; TRIBOMETERS; ULTRATHIN LAYERS;

DURABILITY; FRICTION; OPTIMIZATION; POLYMERS; TRIBOLOGY;

SILICON;

EID: 79957513008     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-011-9765-y     Document Type: Article

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