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Volumn 209, Issue , 2012, Pages 160-168
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Substrate hardness dependency on properties of Al 2O 3 thick films grown by aerosol deposition
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Author keywords
Aerosol deposition; Al 2O 3; Deposition rate; Hardness; Sapphire
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Indexed keywords
ADHESIVE PROPERTIES;
AEROSOL DEPOSITION;
CU SUBSTRATE;
DEPOSITION RATE;
HARD SUBSTRATE;
HARDNESS;
IMPACT VELOCITIES;
INITIAL STAGES;
PROPERTIES OF AL;
ROOM TEMPERATURE;
SAPPHIRE;
SAPPHIRE SUBSTRATES;
SUBSTRATE HARDNESS;
THICKNESS OF FILMS;
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EID: 84866855828
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2012.08.012 Document Type: Article |
Times cited : (39)
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References (24)
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