Grain size tuning of nanocrystalline chemical vapor deposited diamond by continuous electrical bias growth: Experimental and theoretical study

Physica Status Solidi (A) Applications and Materials Science

Volumn 209, Issue 9, 2012, Pages 1675-1682

  Mortet, Vincent ^a,b,c   Zhang, Liang ^d   Eckert, Maxie ^d   D'Haen, Jan ^a,b   Soltani, Ali ^e   Moreau, Myriam ^f   Troadec, David ^e   Neyts, Erik ^d   De Jaeger, Jean Claude ^e   Verbeeck, Jo ^d   Bogaerts, Annemie ^d   Van Tendeloo, Gustaaf ^d   Haenen, Ken ^a,b   Wagner, Patrick ^a,b  

^a HASSELT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

^c UNIVERSITÉ DE TOULOUSE   (France)

^d UNIVERSITY OF ANTWERP   (Belgium)

^e INSTITUT D ELECTRONIQUE   (France)

^f UNIVERSITÉ DES SCIENCES ET TECHNOLOGIES DE LILLE   (France)

Author keywords

bias; chemical vapor deposition; molecular dynamics; nanodiamond; Raman spectroscopy; transmission electron microscopy

Indexed keywords

ATOMIC CONCENTRATION; BIAS; CARBON CONTENT; CHEMICAL VAPOR DEPOSITED DIAMOND; CLASSICAL MOLECULAR DYNAMICS; CRYSTALLINE PROPERTIES; CRYSTALLINE STRUCTURE; CVD GROWTHS; DEFORMATION MODES; DEPOSITED MATERIALS; DIAMOND GRAINS; ELECTRICAL BIAS; EXPERIMENTAL DATA; GRAIN SIZE; NANO DIAMOND; NANOCRYSTALLINE DIAMONDS; NANOCRYSTALLINES; NEGATIVE BIAS; PHASE PURITY; RAMAN LINES; SCATTERING ANALYSIS; SPECTROSCOPIC STUDIES; THEORETICAL STUDY; ULTRA-NANOCRYSTALLINE DIAMOND; UNDERLYING MECHANISM;

ACETYLENE; BIAS VOLTAGE; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; GRAIN SIZE AND SHAPE; HYDROGEN; MOLECULAR DYNAMICS; NANODIAMONDS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SPECTROSCOPIC ANALYSIS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VAPORS;

DIAMONDS;

EID: 84866390185     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201200581     Document Type: Article

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