Analysis of sub-stoichiometric hydrogenated silicon oxide films for surface passivation of crystalline silicon solar cells

Journal of Applied Physics

Volumn 112, Issue 5, 2012, Pages

  Einsele, Florian ^a   Beyer, Wolfhard ^a,b   Rau, Uwe ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b Malibu GmbH Co KG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

A-SI:H; ANNEALING TEMPERATURES; ANNEALING TIME; ATOMIC HYDROGEN; COMPACT MICROSTRUCTURE; CRYSTALLINE SILICON SOLAR CELLS; DEVICE STABILITY; FTIR; HETEROJUNCTION SOLAR CELLS; HYDROGEN CONCENTRATION; HYDROGEN EFFUSION; HYDROGENATED AMORPHOUS SILICON (A-SI:H); HYDROGENATED SILICON OXIDE FILMS; INDUSTRIAL PROCESSING; INTERFACE PASSIVATION; LOW OXYGEN; MATERIAL STRUCTURE; OXYGEN CONCENTRATIONS; OXYGEN INCORPORATION; P-TYPE WAFER; PASSIVATING LAYER; SI DANGLING BONDS; SILICON DANGLING BOND; SURFACE PASSIVATION; TEMPERATURE STABILITY; YIELD SURFACE;

ANNEALING; ATOMS; DANGLING BONDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HETEROJUNCTIONS; HYDROGEN; HYDROGENATION; INTERFACES (MATERIALS); MOLECULAR OXYGEN; OXIDE FILMS; PASSIVATION; SILICON; SILICON OXIDES; SILICON SOLAR CELLS; SILICON WAFERS; THERMODYNAMIC STABILITY;

CRYSTAL ATOMIC STRUCTURE;

EID: 84866366054     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4749415     Document Type: Conference Paper

References (32)

1. A. Terakawa, M. Hishida, S. Yata, W. Shinohara, A. Kitahara, H. Yoneda, Y. Aya, I. Yoshida, M. Iseki, and M. Tanaka, in Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition, Hamburg, Germany (WIP, Munich, 2011), pp. 2362-2365.
2. D. Bätzner, Y. Andrault, L. Andreetta, A. Büchel, W. Frammelsberger, C. Guerin, N. Holm, D. Lachenal, J. Meixenberger, P. Papet, B. Rau, B. Strahm, G. Wahli, and F. Wünsch, in Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition, Hamburg, Germany (WIP, Munich, 2011), pp. 1073-1075.
3. P.-J. Ribeyron, D. Muñoz, J.-P. Kleider, W. Favre, P. Roca i Cabarrocas, M. Labrune, B. Geerligs, A. Weeber, M. Späth, C. Olson, N. Dekker, G. J. H. M. van Sark, J. A. Schüttauf, J. K. Rath, R. E. I. Schropp, M. Tucci, S. De Iullis, I. Gordon, B. OSullivan, A. Descoeudres, S. De Wolf, C. Ballif, T. Schultze, L. Korte, F. Madon, N. Le Quang, M. Scherff, R. Doll, Y. Zemen, and G. Zietek, in Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition, Hamburg, Germany (WIP, Munich, 2011), pp. 853-857.
4. P. J. Rostan, U. Rau, V. X. Nguyen, T. Kirchartz, M. B. Schubert, and J. H. Werner, Sol. Energy Mater. Solar Cells 90, 1345 (2006). 10.1016/j.solmat. 2005.11.010
5. T. F. Schulze, H. N. Beushausen, T. Hansmann, L. Korte, and B. Rech, Appl. Phys. Lett. 95, 182108 (2009). 10.1063/1.3255018
6. S. De Wolf and M. Kondo, J. Appl. Phys. 105, 103707 (2009). 10.1063/1.3129578
7. T. Mueller, S. Schwertheim, M. Scherff, and W. R. Fahrner, Appl. Phys. Lett. 92, 033504 (2008). 10.1063/1.2837192
8. M. Cardona, Phys. Status Solidi B 118, 463 (1983). 10.1002/pssb. 2221180202
9. H. Wagner and W. Beyer, Solid State Commun. 48, 585 (1983). 10.1016/0038-1098(83)90520-3
10. G. Lucovsky and W. B. Pollard, J. Vac. Sci. Technol. A 1 (2), 313 (1983). 10.1116/1.572121
11. A. A. Langford, M. L. Fleet, B. P. Nelson, W. A. Lanford, and N. Maley, Phys. Rev. B 45, 13367 (1992). 10.1103/PhysRevB.45.13367
12. B. G. Yacobi, R. W. Collins, G. Moddel, P. Viktorovitch, and W. Paul, Phys. Rev. B 24, 5907 (1981). 10.1103/PhysRevB.24.5907
13. M. H. Brodsky, M. Cardona, and J. J. Cuomo, Phys. Rev. B 16, 3556 (1977). 10.1103/PhysRevB.16.3556
14. M. Zacharias, T. Drüsedau, A. Panckow, H. Freistedt, and G. Garke, J. Non-Cryst. Solids 169, 29 (1994). 10.1016/0022-3093(94)90221-6
15. L. He, T. Inokuma, Y. Kurata, and S. Hasegawa, J. Non-Cryst. Solids 185, 249 (1995). 10.1016/0022-3093(94)00681-4
16. P. G. Pai, S. S. Chao, Y. Takagi, and G. Lucovsky, J. Vac. Sci. Technol. A 4, 689 (1986). 10.1116/1.573833
17. A. Morimoto, H. Noriyama, and T. Shimizu, Jpn. J. Appl. Phys., Part 1 26, 22 (1987). 10.1143/JJAP.26.22
18. G. Lucovsky, J. Yang, S. S. Chao, J. E. Tyler, and W. Czubatyj, Phys. Rev. B 28, 3225 (1983). 10.1103/PhysRevB.28.3225
19. D. V. Tsu, G. Lucovsky, and B. N. Davidson, Phys. Rev. B 40, 1795 (1989). 10.1103/PhysRevB.40.1795
20. L. Schumann, A. Lehmann, H. Sobotta, V. Riede, U. Teschner, and K. Hübner, Phys. Status Solidi B 110, K69 (1982). 10.1002/pssb.2221100157
21. F. Einsele, W. Beyer, and U. Rau, Phys. Status Solidi C 7, 1021 (2010). 10.1002/pssc.200982752
22. W. Beyer, J. Non-Cryst. Solids 266-269, 845 (2000). 10.1016/S0022- 3093(99)00853-4
23. W. Beyer and F. Einsele, in Advanced Characterization Techniques for Thin Film Solar Cells, edited by, D. Abou-Ras, T. Kichartz, and, U. Rau, (Wiley-VCR, Weinheim, 2011), p. 449.
24. W. Beyer, S. S. Camargo, and R. Saleh, Mater. Res. Soc. Symp. Proc. 609, A23.4 (2000). 10.1557/PROC-609-A23.4
25. W. Beyer and H. Wagner, J. Appl. Phys. 53, 8745 (1982). 10.1063/1.330474
26. N. P. Kherani, B. Liu, K. Virk, T. Kosteski, F. Gaspari, W. T. Shmayda, S. Zukotynski, and K. P. Chen, J. Appl. Phys. 103, 024906 (2008). 10.1063/1.2831495
27. R. A. Sinton and A. Cuevas, Appl. Phys. Lett. 69, 2510 (1996). 10.1063/1.117723
28. A. B. Sproul, J. Appl. Phys. 76, 2851 (1994). 10.1063/1.357521
29. H. Fujiwara and M. Kondo, Appl. Phys. Lett. 90, 013503 (2007). 10.1063/1.2426900
30. R. W. Collins and B. Y. Yang, J. Vac. Sci. Technol. B 7, 1155 (1989). 10.1116/1.584566
31. W. Beyer and H. Wagner, J. Non-Cryst. Solids 59-60, 161 (1983). 10.1016/0022-3093(83)90547-1
32. F. J. Norton, J. Am. Ceram. Soc. 36, 90 (1953). 10.1111/j.1151-2916.1953. tb12843.x