Microstructure fabrication on a β-phase PVDF film by wet and dry etching technology

Journal of Micromechanics and Microengineering

Volumn 22, Issue 8, 2012, Pages

  Han, H ^a   Nakagawa, Y ^a   Takai, Y ^a   Kikuchi, K ^a   Tsuchitani, S ^a   Kosimoto, Y ^a  

^a WAKAYAMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIMETHYL ACETAMIDE; FABRICATION PROCESS; MICROSTRUCTURE FABRICATION; PIEZOELECTRIC CONSTANT; POLYVINYLIDENE FLUORIDES; PROCESS CONDITION; PVDF FILMS; TEMPERATURE HISTORY; WET AND DRY;

CRYSTALLOGRAPHY; DRY ETCHING; MICROSTRUCTURE; PIEZOELECTRIC DEVICES; WET ETCHING;

PIEZOELECTRICITY;

EID: 84866324614     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/8/085030     Document Type: Article

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