Microphone based on Polyvinylidene Fluoride (PVDF) micro-pillars and patterned electrodes

Sensors and Actuators, A: Physical

Volumn 153, Issue 1, 2009, Pages 24-32

  Xu, J ^a   Dapino, M J ^a   Gallego Perez, D ^a   Hansford, D ^a  

^a Ohio State University   (United States)

Author keywords

Microphone; Nano indentation; PVDF; Sensor array

Indexed keywords

ACOUSTIC MEDIUM; ACOUSTIC PRESSURE SENSORS; APPLIED VOLTAGES; FABRICATION PROCESS; HIGH SENSITIVITY; MECHANICAL AND ELECTRICAL PROPERTIES; MECHANICAL COUPLING; MICRO-PILLARS; NANOINDENTATION TESTS; NORMAL STRESS; PATTERNED ELECTRODE; PENALTY FUNCTION; PIEZOELECTRIC RESPONSE; POLYVINYLIDENE FLUORIDES; PVDF; RIGID MEMBRANES; SENSOR CONCEPTS; SENSOR DESIGNS; SENSOR PARAMETER;

ACOUSTICS; CONSTRAINED OPTIMIZATION; ELECTRIC PROPERTIES; MICROPHONES; NANOINDENTATION; PLANTS (BOTANY); SENSOR ARRAYS;

NANOSENSORS;

EID: 67349259633     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.04.008     Document Type: Article

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