A robust and sensitive silicon-MEMS tactile-imager with scratch resistant surface and over-range protection

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1465-1468

  Takao, Hidekuni ^a,b   Yawata, Masaki ^a   Sawada, Kazuaki ^a,b   Ishida, Makoto ^a,b  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Array sensor; Over range protection; Scratch resistant; Silicon MEMS; Tactile imager

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; CORUNDUM; ELECTRIC BREAKDOWN; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; NONMETALS; OPTICAL DESIGN; PHOTORESISTS; SENSORS; SILICON; SULFATE MINERALS; TRANSDUCERS;

ARRAY SENSOR; BACKSIDE CONTACT; FORCE SENSITIVITY; FRAGILITY PROBLEM; HIGH ROBUSTNESS; INTERNATIONAL CONFERENCES; OVER-RANGE PROTECTION; PROTECTIVE MATERIALS; SCRATCH RESISTANCE; SCRATCH RESISTANT; SENSITIVE STRUCTURES; SILICON DIAPHRAGM; SILICON MEMS; SILICON SURFACE; SOLID-STATE SENSORS; SPATIAL RESOLUTION SR); TACTILE IMAGER; TACTILE SENSORS;

IMAGE SENSORS;

EID: 49749152562     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300421     Document Type: Conference Paper

References (7)

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7. H. Takao, M. Yawata, K. Sawada, M. Ishida, "Two-Dimensional Silicon Smart Tactile Image-Sensor with Single Sensing Diaphragm Actuated by Vibrating Pressure for Simultaneous Detection of Force and Object Hardness Distributions," Proc. IEEE MEMS2006, pp. 602-605, Istanbul, 2006