SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 540-543

3D micro patterning on a concave substrate for creating the replica of a cylindrical PDMS stamp

(2) Park, Jongho a Kim, Beomjoon a

a INSTITUTE OF INDUSTRIAL SCIENCE (Japan)

Author keywords

Concave substrate; Curved substrate; Cylindrical stamp; Micro patterning; SU 8

Indexed keywords

CURVED SUBSTRATES; CYLINDRICAL STAMP; EASY FABRICATION; EXPERIMENTAL CONDITIONS; GLASS SUBSTRATES; HIGH ASPECT RATIO; LITHOGRAPHIC METHODS; MICRO CONTACT PRINTING; MICRO PATTERN; MICRO PATTERNING; MICROPATTERNED; POLYDIMETHYLSILOXANE PDMS; SOFT LITHOGRAPHY; SU-8; UV EXPOSURE;

ASPECT RATIO; FABRICATION; LITHOGRAPHY; MICROCHANNELS; MOLDS; PHOTOMASKS; SELF ASSEMBLED MONOLAYERS; SILICONES; THREE DIMENSIONAL;

SUBSTRATES;

EID: 84865600479 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2012.07.034 Document Type: Conference Paper

Times cited : (11)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.