Fabrication of high-aspect ratio SU-8 micropillar arrays

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 483-487

  Amato, Letizia ^a   Keller, Stephan S ^a   Heiskanen, Arto ^a   Dimaki, Maria ^a   Emnéus, Jenny ^a   Boisen, Anja ^a   Tenje, Maria ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

High aspect ratio SU 8; Micropillars; UV photolithography

Indexed keywords

HIGH-ASPECT RATIO; MICRO-PILLARS; PATTERN RESOLUTION; POST PROCESSING; RAMPING RATE; RESOLUTION LIMITS; SUPERCRITICAL; TEMPORAL STABILITY; THREE-DIMENSIONAL PATTERNS;

FABRICATION; OPTIMIZATION; PHOTORESISTS;

ASPECT RATIO;

EID: 84865584866     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.07.092     Document Type: Conference Paper

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