Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography

Microsystem Technologies

Volumn 10, Issue 6-7, 2004, Pages 440-443

  Sato, H ^a   Houshi, Y ^a   Shoji, S ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FABRICATION; GLASS; IRRADIATION; PHOTORESISTS; SUBSTRATES; ULTRAVIOLET RADIATION;

MICRO-PILLARS; MICROFABRICATION; MICROGRAPHS; MULTI-ANGLE EXPOSURE;

MICROSTRUCTURE;

EID: 10044221064     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0400-9     Document Type: Conference Paper

References (7)

1. Hamano T et al (1999) Plastic submillimeter wave components fabricated by UV lithograph process. Tech. Digest, Int. Conf. Solid-State Sensors and Actuators 484-487
2. Kawamura A; Ike S; Shoji S (1999) Fabrication of fine metal microstructures packaged in the bonded glass substrates, Proc SPIE 3893: 486-493
3. Beuret C et al (1994) Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplating. Proc IEEE Micro Electro Mech Syst Workshop 81-85
4. Manhee Han et al (2002) Microfabrication of 3D oblique structures by inclined UV lithography. Proc Micro Total Anal Syst Symp 106-108
5. Manhee Han et al (2003) Fabrication of 3D microstructures with inclined/rotated UV lithography. Proc Int Conf Micro Electro Mech Syst 554-557
6. Sato H; Kakinuma T; Go JS; Shoji S (2003) A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application. Proc Int Conf Micro Electro Mech Syst 223-226
7. Yong-Kyu Yoon; Jung-Hwan Park; Florent Cros; Mark G Allen (2003) Integrated vertical screen microfilter system using inclined SU-8 structures. Proc Int Conf Micro Electro Mech Syst 227-230