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Volumn 85, Issue , 2012, Pages 68-70
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High quality transparent conductive SnO 2/Ag/SnO 2 tri-layer films deposited at room temperature by magnetron sputtering
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Author keywords
SnO 2 Ag SnO 2; Sputtering electrical and optical properties; Thin films; Transparent conducting oxide
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Indexed keywords
ANALYTICAL TOOL;
DC MAGNETRON SPUTTERING;
ELECTRICAL AND OPTICAL PROPERTIES;
FIELD EMISSION SCANNING ELECTRON MICROSCOPY;
FIGURE OF MERITS;
FOUR-POINT PROBE;
HALL MEASUREMENTS;
HIGH QUALITY;
LAYER THICKNESS;
OPTOELECTRONIC PROPERTIES;
QUARTZ GLASS SUBSTRATES;
RF-MAGNETRON SPUTTERING;
ROOM TEMPERATURE;
SNO 2/AG/SNO 2;
TRANSPARENT CONDUCTING OXIDE;
TRANSPARENT CONDUCTIVE;
UV-VIS-NIR;
VISIBLE LIGHT REGION;
ELECTRIC PROPERTIES;
FIELD EMISSION MICROSCOPES;
INFRARED DEVICES;
MAGNETRON SPUTTERING;
OPTICAL PROPERTIES;
QUARTZ;
SUBSTRATES;
THIN FILMS;
SILVER;
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EID: 84865077208
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2012.06.108 Document Type: Article |
Times cited : (66)
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References (16)
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