The description of friction of silicon MEMS with surface roughness: Virtues and limitations of a stochastic Prandtl-Tomlinson model and the simulation of vibration-induced friction reduction

Beilstein Journal of Nanotechnology

Volumn 1, Issue 1, 2010, Pages 163-171

  van Spengen, W Merlijn ^a,b   Turq, Viviane ^c   Frenken, Joost W M ^d  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Also with Falco Systems   (Netherlands)

^c UNIVERSITÉ PAUL SABATIER   (France)

^d LEIDEN UNIVERSITY   (Netherlands)

Author keywords

MEMS; Microscale Friction Reduction; Normal Force Modulation; Stochastic Prandtl Tomlinson Model; Surface Roughness

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPE (AFM); ATOMIC-SCALE FRICTION; CORRELATION FUNCTION; FRICTION REDUCTION; MEASUREMENT DATA; MEMSDEVICES; MICRO-SCALE FRICTION; NORMAL FORCES; ON CHIPS; RANDOM ROUGHNESS; SILICON MEMS; SLIDING SURFACE; VIBRATION AMPLITUDE;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; FRICTION; MEMS; MODULATION; STOCHASTIC SYSTEMS; SURFACE ROUGHNESS; TRIBOLOGY;

STOCHASTIC MODELS;

EID: 84865032195     PISSN: None     EISSN: 21904286     Source Type: Journal    
DOI: 10.3762/bjnano.1.20     Document Type: Article

References (31)

1. Mate, C. M.; McClelland, G. M.; Erlandsson, R.; Chiang, S. Phys. Rev. Lett. 1987, 59, 1942-1945
2. Bhushan, B., Ed. Springer handbook of nanotechnology, 2nd ed.; Springer: Berlin, 2007; pp 791-1456.
3. Carpick, R. W.; Salmeron, M. Chem. Rev. 1997, 97, 1163-1194
4. Prandtl, L. Z. Angew. Math. Mech. 1928, 8, 85-106
5. Tomlinson, G. A. Philos. Mag. 1929, 7, 905-939.
6. Zhong, W.; Tománek, D. Phys. Rev. Lett. 1990, 64, 3054-3057
7. Meyer, E.; Overney, R. M.; Dransfeld, K.; Gyalog, T., Eds. Nanoscience: Friction and rheology on the nanometer scale; World Scientific: Singapore, 2002; pp 123-174.
8. Dienwiebel, M.; Verhoeven, G. S.; Pradeep, N.; Frenken, J. W. M.; Heimberg, J. A.; Zandbergen, H. W. Phys. Rev. Lett. 2004, 92, 126101
9. Socoliuc, A.; Bennewitz, R.; Gnecco, E.; Meyer, E. Phys. Rev. Lett. 2004, 92, 134301
10. Krylov, S. Y.; Frenken, J. W. M. J. Phys.: Condens. Matter 2008, 20, 354003
11. Riedo, E.; Gnecco, E.; Bennewitz, R.; Meyer, E.; Brune, H. Phys. Rev. Lett. 2003, 91, 084502
12. Kim, S. H.; Asay, D. B.; Dugger, M. T. Nano Today 2007, 2, 22-29
13. Fisher, D. S. Phys. Rev. B 1985, 31, 1396-1427
14. Fisher, D. S. Phys. Rep. 1998, 301, 113-150
15. Chauve, P.; Le Doussal, P.; Wiese, K. J. Phys. Rev. Lett. 2001, 86, 1785-1788
16. Fajardo, O. Y.; Mazo, J. J. Phys. Rev. B 2010, 82, 035435
17. Persson, B. N. J. J. Chem. Phys. 2001, 115, 3840-3861
18. Persson, B. N. J.; Albohr, O.; Tartaglino, U.; Volokitin, A. I.; Tosatti, E. J. Phys.: Condens. Matter 2005, 17, R1-R62
19. van Spengen, W.; Frenken, J. W. M. Tribol. Lett. 2007, 28, 149-156
20. Senft, D. C.; Dugger, M. T. Proc. SPIE 1997, 3224, 31-38
21. van Spengen, W. M.; Oosterkamp, T. H. J. Micromech. Microeng. 2007, 17, 828-834
22. Mummery, L. Surface texture analysis, The handbook; Hommelwerke: Muhlhausen, 1990.
23. Berman, A. D.; Ducker, W. A.; Israelachvili, J. N. Langmuir 1996, 12, 4559-4563
24. Igor Pro 6.04 analysis software; Wavemetrics: Lake Oswego, OR, U. S. A., 2008.
25. van Spengen, W. M.; Bakker, E.; Frenken, J. W. M. J. Micromech. Microeng. 2007, 17, S91-S97
26. Szlufarska, I.; Chandross, M.; Carpick, R. W. J. Phys. D: Appl. Phys. 2008, 41, 123001
27. Jinesh, K. B.; Frenken, J. W. M. Phys. Rev. Lett. 2008, 101, 036101
28. van Spengen, W. M.; Wijts, G. H. C. J.; Turq, V.; Frenken, J. W. M. J. Adhes. Sci. Technol. 2010, 24, 2669-2680.
29. Fridman, H. D.; Levesque, P. J. Appl. Phys. 1959, 30, 1572-1575.
30. Popov, V. L.; Starcevic, J.; Filippov, A. E. Tribol. Lett. 2010, 39, 25-30
31. Socoliuc, A.; Gnecco, E.; Maier, S.; Pfeiffer, O.; Baratoff, A.; Bennewitz, R.; Meyer, E. Science 2006, 313, 207-210