Fabrication and characterization of compact silicon oxynitride waveguides on silicon chips

Journal of Optics (United Kingdom)

Volumn 14, Issue 8, 2012, Pages

  Yin, Lianghong ^a,e   Lu, Ming ^b   Wielunski, Leszek ^c,d   Song, Weiwei ^a   Tan, Jun ^a   Lu, Yicheng ^a,d   Jiang, Wei ^a,d  

^a RUTGERS UNIVERSITY   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c RUTGERS UNIVERSITY   (United States)

^d RUTGERS UNIVERSITY   (United States)

^e IBM MICROELECTRONICS   (United States)

Author keywords

optical delay lines; silicon oxynitride; spiral waveguide

Indexed keywords

FABRICATION; NITRIDES; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON NITRIDE;

CORE-CLADDING INTERFACES; FABRICATION AND CHARACTERIZATIONS; HIGH-TEMPERATURE ANNEALING; OPTICAL DELAY LINES; RUTHERFORD BACK-SCATTERING SPECTROMETRY; SILICON OXYNITRIDE WAVEGUIDES; SILICON OXYNITRIDES; SPIRAL WAVEGUIDES;

SILICON COMPOUNDS;

EID: 84864950860     PISSN: 20408978     EISSN: 20408986     Source Type: Journal    
DOI: 10.1088/2040-8978/14/8/085501     Document Type: Article

References (30)

1. Lipson M 2005 Guiding, modulating, and emitting light on silicon - challenges and opportunities J. Lightwave Technol. 23 4222-38 (Pubitemid 43137029)
2. Soref R A 2006 The past, present, and future of silicon photonics IEEE J. Sel. Top. Quantum Electron. 12 1678-87 (Pubitemid 44956141)
3. Jalali B and Fathpour S 2006 Silicon photonics J. Lightwave Technol. 24 4600-15 (Pubitemid 46357231)
4. Liu A S, Jones R, Liao L, Samara-Rubio D, Rubin D, Cohen O, Nicolaescu R and Paniccia M 2004 A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor Nature 427 615-8 (Pubitemid 38248476)
5. Xu Q F, Schmidt B, Pradhan S and Lipson M 2005 Micrometre-scale silicon electro-optic modulator Nature 435 325-7 (Pubitemid 40745539)
6. Gu L L, Jiang W, Chen X N, Wang L and Chen R T 2007 High speed silicon photonic crystal waveguide modulator for low voltage operation Appl. Phys. Lett. 90 071105
7. Kang Y M et al 2009 Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain-bandwidth product Nature Photon. 3 59-63
8. Assefa S, Xia F and Vlasov Y A 2010 Reinventing germanium avalanche photodetector for nanophotonic on-chip optical interconnects Nature 464 80-4
9. Liu J, Sun X, Camacho-Aguilera R, Kimerling L C and Michel J 2010 Ge-on-Si laser operating at room temperature Opt. Lett. 35 679-81
10. Boyraz O and Jalali B 2004 Demonstration of a silicon Raman laser Opt. Express 12 5269-73
11. Lee J Y, Yin L, Agrawal G P and Fauchet P M 2010 Ultrafast optical switching based on nonlinear polarization rotation in silicon waveguides Opt. Express 18 11514-23
12. Matthews P J, Frankel M Y and Esman R D 1998 A wide-band fiber-optic true-time-steered array receiver capable of multiple independent simultaneous beams IEEE Photon. Technol. Lett. 10 722-4
13. Chen M Y, Subbaraman H and Chen R T 2008 Photonic crystal fiber beamformer for multiple x-band phased-array antenna transmissions IEEE Photon. Technol. Lett. 20 375-7
14. Xia F N, Sekaric L and Vlasov Y 2007 Ultracompact optical buffers on a silicon chip Nature Photon. 1 65-71
15. LeGrange J D, Simsarian J E, Bernasconi P, Buhl L, Gripp J and Neilson D T 2009 Demonstration of an integrated buffer for an all-optical packet router IEEE Photon. Technol. Lett. 21 781-3
16. Park H, Mack J P, Blumenthal D J and Bowers J E 2008 An integrated recirculating optical buffer Opt. Express 16 11124-31
17. Bauters J F, Heck M J R, John D D, Barton J S, Bruinink C M, Leinse A, Heideman R G, Blumenthal D J and Bowers J E 2011 Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding Opt. Express 19 24090-101
18. 4 waveguides Opt. Express 19 3163-74
19. Payne F P and Lacey J P R 1994 A theoretical analysis of scattering loss from planar optical waveguides Opt. Quantum Electron. 26 977-86
20. Song W, Integlia R A and Jiang W 2010 Slow light loss due to roughness in photonic crystal waveguides: an analytic approach Phys. Rev. B 82 235306
21. Gondarenko A, Levy J S and Lipson M 2009 High confinement micron-scale silicon nitride high Q ring resonator Opt. Express 17 11366-70
22. Bona G-L, Germann R and Offrein B J 2003 SiON high refractive-index waveguide and planar lightwave circuits IBM J. Res. Dev. 47 239-49
23. Worhoff K, Roeloffzen C G H, De Ridder R M, Driessen A and Lambeck P V 2007 Design and application of compact and highly tolerant polarization- independent waveguides J. Lightwave Technol. 25 1276-83 (Pubitemid 46758850)
24. Fadel M, Bülters M, Niemand M, Voges E and Krummrich P M 2009 Low-loss and low-birefringence high-contrast silicon-oxynitride waveguides for optical communication J. Lightwave Technol. 27 698-705
25. Fallahkhair A B, Li K S and Murphy T E 2008 Vector finite difference mode-solver for anisotropic dielectric waveguides J. Lightwave Technol. 26 1423-31
26. Denisse C M M, Troost K Z, Habraken F H P M, van der Weg W F and Hendriks M 1986 Annealing of plasma silicon oxynitride films J. Appl. Phys. 60 2543-7
27. Snyder A W and Love J D 1983 Optical Waveguide Theory (London: Chapman and Hall)
28. International Technology Roadmap for Semiconductors 2011 edn Lithography Tables, www.itrs.net
29. Spuhler M M, Offrein B J, Bona G L, Germann R, Massarek I and Erni D 1998 A very short planar silica spot-size converter using a nonperiodic segmented waveguide IEEE J. Lightwave Technol. 16 1680-5 (Pubitemid 128641291)
30. Ahn J H, Kim H S, Lee K J, Jeon S, Kang S J, Sun Y G, Nuzzo R G and Rogers J A 2006 Heterogeneous three-dimensional electronics by use of printed semiconductor nanomaterials Science 314 1754-7 (Pubitemid 44969082)