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Active and Passive Electronic Components
Volumn 2012, Issue , 2012, Pages
Design and fabrication of a novel t-shaped piezoelectric ZnO cantilever sensor
Author keywords

[No Author keywords available]
Indexed keywords

CANTILEVER SENSORS; FUNDAMENTAL RESONANT FREQUENCIES; HIGH QUALITY; KOH ETCHING; MEMS TECHNOLOGY; RAYLEIGH-RITZ METHODS; SENSOR APPLICATIONS; XRD; ZNO; ZNO FILMS;
EID: 84864922044     PISSN: 08827516     EISSN: 15635031     Source Type: Journal    
DOI: 10.1155/2012/834961     Document Type: Article
Times cited : (10)
References (10)
  • 1
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    • (2000) Talanta , vol.53 , Issue.3 , pp. 599-608
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  • 2
    • 33847299426 scopus 로고    scopus 로고
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    • DOI 10.1007/s00542-006-0216-x, HARMST, High Asprect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10-13 June 2005 - part 2
    • Lee Y., Lim G., Moon W., A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitation Microsystem Technologies 2007 13 5-6 563 567 (Pubitemid 46324436)
    • (2007) Microsystem Technologies , vol.13 , Issue.5-6 , pp. 563-567
    • Lee, Y.1    Lim, G.2    Moon, W.3
  • 3
    • 84860388058 scopus 로고    scopus 로고
    • Design and characterization of miniature piezoelectric generators with low resonant frequency
    • Cao Z., Zhang J., Kuwano H., Design and characterization of miniature piezoelectric generators with low resonant frequency Sensors and Actuators A 2012 179 178 184
    • (2012) Sensors and Actuators A , vol.179 , pp. 178-184
    • Cao, Z.1    Zhang, J.2    Kuwano, H.3
  • 4
    • 68949194549 scopus 로고    scopus 로고
    • Review: Environmental friendly lead-free piezoelectric materials
    • Panda P. K., Review: environmental friendly lead-free piezoelectric materials Journal of Materials Science 2009 44 19 5049 5062
    • (2009) Journal of Materials Science , vol.44 , Issue.19 , pp. 5049-5062
    • Panda, P.K.1
  • 6
    • 26844520789 scopus 로고    scopus 로고
    • Simulation and design of piezoelectric microcantilever chemical sensors
    • DOI 10.1016/j.sna.2005.07.009, PII S0924424705004206
    • Zhou W., Khaliq A., Tang Y., Ji H., Selmic R. R., Simulation and design of piezoelectric microcantilever chemical sensors Sensors and Actuators A 2005 125 1 69 75 (Pubitemid 41454899)
    • (2005) Sensors and Actuators, A: Physical , vol.125 , Issue.1 , pp. 69-75
    • Zhou, W.1    Khaliq, A.2    Tang, Y.3    Ji, H.4    Selmic, R.R.5
  • 7
    • 0001146439 scopus 로고    scopus 로고
    • Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy
    • PII S0924424796011673
    • Itoh T., Suga T., Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy Sensors and Actuators A 1996 54 13 477 481 (Pubitemid 126356997)
    • (1996) Sensors and Actuators, A: Physical , vol.54 , Issue.1-3 , pp. 477-481
    • Itoh, T.1    Suga, T.2
  • 8
    • 84857188804 scopus 로고    scopus 로고
    • Preparation and characterization of piezoelectric films of ZnO and AlN by RF sputtering for RF MEMS applications
    • Sudhir C., Atul V. S., Preparation and characterization of piezoelectric films of ZnO and AlN by RF sputtering for RF MEMS applications Key Engineering Materials 2012 500 84 89
    • (2012) Key Engineering Materials , vol.500 , pp. 84-89
    • Sudhir, C.1    Atul, V.S.2
  • 9
    • 32844455386 scopus 로고    scopus 로고
    • Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness
    • DOI 10.1016/j.msec.2005.10.079, PII S0928493105004121
    • Lochon F., Fadel L., Dufour I., Rebire D., Pistré J., Silicon made resonant microcantilever: dependence of the chemical sensing performances on the sensitive coating thickness Materials Science and Engineering C 2006 26 2-3 348 353 (Pubitemid 43254806)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.