Simulation and design of piezoelectric microcantilever chemical sensors

Sensors and Actuators, A: Physical

Volumn 125, Issue 1, 2005, Pages 69-75

  Zhou, Wei ^a   Khaliq, Abdul ^a,c   Tang, Yanjun ^a,c   Ji, Haifeng ^a,b,c   Selmic, Rastko R ^a,b,c  

^a LOUISIANA TECH UNIVERSITY   (United States)

^b Louisiana Tech University   (United States)

^c LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

Cantilever; Chemical sensor; MEMS; MEMS simulation; Microcantilever; Piezoelectric

Indexed keywords

CANTILEVERS; MEMS; MEMS SIMULATION; MICROCANTILEVERS; PIEZOELECTRIC MULTI-LAYER CANTILEVERS;

CANTILEVER BEAMS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MACHINE DESIGN; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES;

CHEMICAL SENSORS;

EID: 26844520789     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.07.009     Document Type: Article

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