Surface acoustic wave ultraviolet detector based on zinc oxide nanowire sensing layer

Sensors and Actuators, A: Physical

Volumn 184, Issue , 2012, Pages 34-40

  Peng, Wenbo ^a   He, Yongning ^a   Wen, Changbao ^b   Ma, Ke ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b CHANG'AN UNIVERSITY   (China)

Author keywords

Surface acoustic wave; Ultraviolet; Zinc oxide nanowire

Indexed keywords

CENTRAL FREQUENCY; GOOD STABILITY; HIGH SENSITIVITY; INTERDIGITAL TRANSDUCER; MORLET WAVELET FUNCTION; PHOTO-ELECTRICAL PROPERTIES; PHOTOELECTRIC RESPONSE; RESPONSE CHARACTERISTIC; SAW DEVICE; SENSING AREAS; SENSING LAYERS; SURFACE ACOUSTIC WAVES; THERMAL EVAPORATION METHOD; TRANSFER METHOD; ULTRAVIOLET; UV DETECTION; ZINC OXIDE (ZNO); ZINC OXIDE NANOWIRES; ZNO; ZNO FILMS; ZNO NANOWIRES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; DETECTORS; FREQUENCY SHIFT KEYING; LIGHT SOURCES; NANOWIRES; THERMAL EVAPORATION;

ZINC OXIDE;

EID: 84864668956     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.06.017     Document Type: Article

References (34)

1. S. Matsumoto, and B. Goto Solar UV monitor with yeast and the possibility of estimating ozone-layer thickness Naturwissenschaften 85 3 1998 127 130 (Pubitemid 28166730)
2. G.Y. Chai, O. Lupan, L. Chow, and H. Heinrich Crossed zinc oxide nanorods for ultraviolet radiation detection Sensors and Actuators A-Physical 150 2 2009 184 187
3. C. Muller, D. Moreau, D. Fonteyn, J.L. Bertaux, and O. Korablev SPICAM-light on Mars-Express as a monitor of surface UV radiation and atmospheric oxidants Planetary and Space Science 49 2 2001 165 171 (Pubitemid 33649556)
4. S.K. Zhang, W.B. Wang, I. Shtau, F. Yun, L. He, H. Morkoc, X. Zhou, M. Tamargo, and R.R. Alfano Backilluminated GaN/AlGaN heterojunction ultraviolet photodetector with high internal gain Applied Physics Letters 81 25 2002 4862 4864
5. S.W. Seo, K.K. Lee, S.B. Kang, S. Huang, W.A. Doolittle, N.M. Jokerst, and A.S. Brown GaN metal-semiconductor-metal photodetectors grown on lithium gallate substrates by molecular-beam epitaxy Applied Physics Letters 79 9 2001 1372 1374 (Pubitemid 33599604)
6. M. Nakano, T. Makino, A. Tsukazaki, K. Ueno, A. Ohtomo, T. Fukumura, H. Yuji, S. Akasaka, K. Tamura, K. Nakahara, T. Tanabe, A. Kamisawa, and M. Kawasaki Transparent polymer Schottky contact for a high performance visible-blind ultraviolet photodiode based on ZnO Applied Physics Letters 93 12 2008 123309
7. V. Chivukula, D. Ciplys, M. Shur, and P. Dutta ZnO nanoparticle surface acoustic wave UV sensor Applied Physics Letters 96 23 2010 233512
8. C.-L. Wei, Y.-C. Chen, K.-S. Kao, K.-T. Wu, D.-L. Cheng, and P.-T. Hsieh Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications Journal of Micro/Nanolithography, MEMS and MOEMS 9 3 2010 031009
9. L.P. Schuler, M.M. Alkaisi, P. Miller, and R.J. Reeves UV sensing using surface acoustic wave device on DC sputtered ZnO monolayer Microelectronic Engineering 83 4-9 2006 1403 1406
10. N.W. Emanetoglu, J. Zhu, Y. Chen, J. Zhong, Y.M. Chen, and Y.C. Lu Surface acoustic wave ultraviolet photodetectors using epitaxial ZnO multilayers grown on r-plane sapphire Applied Physics Letters 85 17 2004 3702 3704
11. W. Wei-Shan, W. Tsung-Tsong, C. Tai-Hsu, and C. Yung-Yu A ZnO nanorod-based SAW oscillator system for ultraviolet detection Nanotechnology 20 13 2009 135503
12. C. Zhu, and W. Lu Surface Acoustic Wave Wavelet-Transforming Device and Applications [M] 2004 National Defense Industry Press Beijing
13. C. Wen, Surface Acoustic Wave Wavelet-Transforming Device and Applications in Gas Sensors [D], Xi'an Jiaotong University, PhD thesis, 2007.
14. C.B. Wen, and C.C. Zhu A novel architecture of implementing wavelet transform and reconstruction processor with SAW device based on MSC Sensors and Actuators A-Physical 126 1 2006 148 153
15. C.B. Wen, and C.C. Zhu Time synchronous dyadic wavelet processor array using surface acoustic wave devices Smart Materials and Structures 15 4 2006 939 945
16. Z.K. Tang, G.K.L. Wong, P. Yu, M. Kawasaki, A. Ohtomo, H. Koinuma, and Y. Segawa Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films Applied Physics Letters 72 25 1998 3270 3272 (Pubitemid 128673625)
17. M.H. Huang, Y.Y. Wu, H. Feick, N. Tran, E. Weber, and P.D. Yang Catalytic growth of zinc oxide nanowires by vapor transport Advanced Materials 13 2 2001 113 116 (Pubitemid 32188783)
18. M.J. Zheng, L.D. Zhang, G.H. Li, and W.Z. Shen Fabrication and optical properties of large-scale uniform zinc oxide nanowire arrays by one-step electrochemical deposition technique Chemical Physics Letters 363 1-2 2002 123 128
19. Y. He, S. Zhang, and C. Zhu Preparation and characteristics of ZnO nanowires based on the thermal evaporation of metal zinc at low temperature 19th International Vacuum Nanoelectronics Conference and 50th International Field Emission Symposium (IEEE Cat. No. 06TH8886) 2006 141 142
20. J.J. Wu, and S.C. Liu Low-temperature growth of well-aligned ZnO nanorods by chemical vapor deposition Advanced Materials 14 3 2002 215 218
21. K. Ogata, K. Maejima, and S. Fujita Growth mode control of ZnO toward nanorod structures or high-quality layered structures by metal-organic vapor phase epitaxy Journal of Crystal Growth 248 2003 25 30
22. Z.W. Pan, Z.R. Dai, and Z.L. Wang Nanobelts of semiconducting oxides Science 291 5510 2001 1947 1949
23. Z.L. Wang Nanobelts, nanowires, and nanodiskettes of semiconducting oxides - from materials to nanodevices Advanced Materials 15 5 2003 432 436
24. H. Kind, H. Yan, B. Messer, M. Law, and P. Yang Nanowire ultraviolet photodetectors and optical switches Advanced Materials 14 2 2002 158 160 (Pubitemid 34091540)
25. L. Luo, Y.F. Zhang, S.S. Mao, and L.W. Lin Fabrication and characterization of ZnO nanowires based UV photodiodes Sensors and Actuators A-Physical 127 2 2006 201 206
26. Y.N. He, W. Zhang, S.C. Zhang, M. Qi, M. Ye, X. Li, and Y.L. Xu ZnO nanowires film UV detector based MSM structure Proceedings 8th International Vacuum Electron Sources Conference and Nanocarbon (2010 IVESC) 2010 351 352
27. A.J. Ricco, S.J. Martin, and T.E. Zipperian Surface acoustic-wave gas sensor based on film conductivity changes Sensors and Actuators 8 4 1985 319 333
28. L. Fan, H. Ge, S.Y. Zhang, H. Zhang, and J. Zhu Optimization of sensitivity induced by surface conductivity and sorbed mass in surface acoustic wave gas sensors Sensors and Actuators B-Chemical 161 1 2012 114 123
29. Y.N. He, S.G. Shang, W.Y. Cui, X. Li, C.C. Zhu, and X. Hou Investigation of luminescence properties of ZnO nanowires at room temperature Microelectronics Journal 40 3 2009 517 519
30. 3 hybrid surface acoustic wave filter Applied Physics Letters 83 17 2003 3617 3619
31. S. Kumar, G.H. Kim, K. Sreenivas, and R. Tandon ZnO based surface acoustic wave ultraviolet photo sensor Journal of Electroceramics 22 1-3 2009 198 202
32. D.T. Phan, and G.S. Chung Characteristics of SAW UV sensors based on a ZnO/Si structure using third harmonic mode Current Applied Physics 12 1 2012 210 213
33. D.T. Phan, and G.S. Chung Fabrication and characteristics of a surface acoustic wave UV sensor based on ZnO thin films grown on a polycrystalline 3C-SiC buffer layer Current Applied Physics 12 2 2012 521 524
34. S. Bai, W.W. Wu, Y. Qin, N.Y. Cui, D.J. Bayerl, and X.D. Wang High-performance integrated ZnO nanowire UV sensors on rigid and flexible substrates Advanced Functional Materials 21 23 2011 4464 4469