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Journal of Electroceramics

Volumn 22, Issue 1-3, 2009, Pages 198-202

ZnO based surface acoustic wave ultraviolet photo sensor

(4) Kumar, Sanjeev a Kim, Gil Ho a,b Sreenivas, K c Tandon, R P c

a Sungkyunkwan University (South Korea)

b Sungkyunkwan University (South Korea)

c UNIVERSITY OF DELHI (India)

Author keywords

Magnetron sputtering; SAW devices; UV sensor; ZnO film

Indexed keywords

ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; CHARGE CARRIERS; FABRICATION; MAGNETRON SPUTTERING; MAGNETRONS; METALLIC FILMS; SEMICONDUCTING ZINC COMPOUNDS; SENSORS; ULTRAVIOLET DEVICES; ZINC OXIDE;

ACOUSTOELECTRIC INTERACTIONS; CENTRAL FREQUENCIES; FREQUENCY OF OPERATIONS; LOW COSTS; PHOTO SENSORS; PHOTOGENERATED CHARGE CARRIERS; PHOTORESPONSE; RF MAGNETRON SPUTTERING TECHNIQUES; SAW DEVICES; SURFACE ACOUSTIC WAVES; ULTRA VIOLETS; UV ILLUMINATIONS; UV SENSOR; ZNO; ZNO FILM; ZNO THIN FILMS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 60649112294 PISSN: 13853449 EISSN: 15738663 Source Type: Journal
DOI: 10.1007/s10832-007-9409-7 Document Type: Article

Times cited : (60)

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