Fabrication and characteristics of a surface acoustic wave UV sensor based on ZnO thin films grown on a polycrystalline 3C-SiC buffer layer

Current Applied Physics

Volumn 12, Issue 2, 2012, Pages 521-524

  Phan, Duy Thach ^a   Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

3C SiC buffer layer; SAW UV sensor; ZnO film

Indexed keywords

C-AXIS ORIENTATIONS; LINEAR RESPONSE; MAGNETRON SPUTTERING SYSTEMS; PHOTOLUMINESCENCE SPECTRUM; POLYCRYSTALLINE; POLYCRYSTALLINE 3C-SIC; SAW RESONATORS; SIC BUFFER LAYERS; SURFACE ACOUSTIC WAVES; ULTRA-VIOLET; UV DETECTOR; UV ILLUMINATIONS; UV INTENSITY; UV SENSOR; ZNO; ZNO FILM; ZNO FILMS; ZNO THIN FILM;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; BUFFER LAYERS; METALLIC FILMS; OPTICAL FILMS; OXIDE FILMS; RESONATORS; SENSORS; SILICON CARBIDE; THIN FILMS; ULTRAVIOLET DEVICES; X RAY DIFFRACTION;

ZINC OXIDE;

EID: 81155133741     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2011.08.013     Document Type: Article

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