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Current Applied Physics

Volumn 12, Issue 1, 2012, Pages 210-213

Characteristics of SAW UV sensors based on a ZnO/Si structure using third harmonic mode

(2) Phan, Duy Thach a Chung, Gwiy Sang a

a University of Ulsan (South Korea)

Author keywords

Surface acoustic wave; Third harmonic; UV sensor; Zinc oxide

Indexed keywords

ACTIVE LAYER; FREQUENCY SHIFT; FUNDAMENTAL MODES; INTERDIGITAL TRANSDUCER; PHOTOLUMINESCENCE SPECTRUM; PIEZOELECTRIC LAYERS; SAW RESONATORS; SI(1 0 0); SURFACE ACOUSTIC WAVES; THIRD HARMONIC; THIRD HARMONIC MODE; ULTRA-VIOLET; UV DETECTION; UV INTENSITY; UV SENSOR; ZNO; ZNO THIN FILM;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; SENSORS; THIN FILMS; ULTRASONIC TRANSDUCERS; ULTRAVIOLET DEVICES; X RAY DIFFRACTION; ZINC OXIDE;

HARMONIC ANALYSIS;

EID: 80054805809 PISSN: 15671739 EISSN: None Source Type: Journal
DOI: 10.1016/j.cap.2011.06.004 Document Type: Article

Times cited : (28)

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