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Volumn 21, Issue 4, 2012, Pages 771-773

A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM

Author keywords

Atomic force microscopy; electrostatic actuators; microelectromechanical systems (MEMS); nanopositioning

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPE (AFM); ELECTROSTATIC ACTUATION; EXPERIMENTAL CHARACTERIZATION; IN-PLANE DISPLACEMENT; NANO-POSITIONER; NANO-POSITIONING; ON CHIPS; PARALLEL KINEMATICS; RESONANT MODE; SCANNING STAGES;

EID: 84864598700     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2191940     Document Type: Article
Times cited : (44)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.