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Applied Physics A: Materials Science and Processing

Volumn 108, Issue 2, 2012, Pages 423-430

Pulsed laser deposition using diffractively shaped excimer-laser beams

(5) Kekkonen, V a Hakola, A b Likonen, J b Ge, Y a Kajava, T a,c

a AALTO UNIVERSITY (Finland)

b VTT TECHNICAL RESEARCH CENTRE OF FINLAND (Finland)

c Picodeon Ltd Oy (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DENSITY; FLAT-TOP; FLUENCES; LASER SPOTS; MARTENSITIC PHASE; NI-MN-GA; OPTICAL SET-UP; OPTIMAL CONDITIONS; PLD PROCESS; REPRODUCIBILITIES; STOICHIOMETRIC COMPOSITIONS; STRUCTURAL CHARACTERIZATION; UNIFORM INTENSITY;

DEPOSITION; GALLIUM; LASER BEAMS; MANGANESE; PULSED LASER DEPOSITION; SECONDARY ION MASS SPECTROMETRY; SILICIDES;

PROGRAMMABLE LOGIC CONTROLLERS;

EID: 84864579249 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-012-6904-8 Document Type: Article

Times cited : (3)

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