Flat-top profile of an excimer-laser beam generated using beam-splitter gratings

Optics Communications

Volumn 268, Issue 2, 2006, Pages 289-293

  Kajava, T ^a   Hakola, A ^a   Elfstrom H ^b   Simonen, J ^b   Paakkonen P ^b   Turunen, J ^b  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

Diffractive optics; Excimer laser; Flat top beam; Pulsed laser deposition

Indexed keywords

DIFFRACTION GRATINGS; EXCIMER LASERS; LITHOGRAPHY; MICROMACHINING; OPTICAL BEAM SPLITTERS; PULSED LASER DEPOSITION; DIFFRACTIVE OPTICS; PHOTOLITHOGRAPHY;

BEAM-SPLITTER GRATINGS; ENERGY DENSITY; FLAT-TOP BEAM;

LIGHT; LASER BEAMS;

BEAM-SPLITTER GRATINGS; ENERGY DENSITY; FLAT-TOP BEAM;

EID: 33750506123     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2006.07.030     Document Type: Article

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