Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing

Applied Optics

Volumn 36, Issue 32, 1997, Pages 8481-8489

  Nikolajeff, Fredrik ^a   Hård, Sverker ^a   Curtis, Bernard ^b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

Diffractive optical element; Excimer laser; Homogenizer; Hot embossing; Reactive ion etching; Replication

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAM LITHOGRAPHY; EXCIMER LASERS; FUSED SILICA; GEOMETRICAL OPTICS; HELIUM NEON LASERS; INTERFEROMETRY; LASER BEAMS; REACTIVE ION ETCHING; SUBSTRATES;

DIFFRACTIVE MICROLENSES; DIFFRACTIVE OPTICAL ELEMENT; EXCIMER LASER BEAM HOMOGENIZING; HOT EMBOSSING;

LENSES;

EID: 0031276178     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.008481     Document Type: Article

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