Designing a robust high-speed CMOS-MEMS capacitive humidity sensor

Journal of Micromechanics and Microengineering

Volumn 22, Issue 8, 2012, Pages

  Lazarus, N ^a   Fedder, G K ^a,b,c  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE HUMIDITY SENSORS; CMOS-MEMS; COATING POLYMERS; HIGH-SENSITIVITY; HIGH-SPEED; HIGH-SPEED SENSORS; RESPONSE TIME CONSTANT;

POLYSILICON;

HUMIDITY SENSORS;

EID: 84864423874     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/8/085021     Document Type: Article

References (15)

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