Integrated vertical parallel-plate capacitive humidity sensor

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Lazarus, N ^a   Fedder, G K ^a,b,c  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE HUMIDITY SENSORS; CHEMICAL VAPOR; DETECTABLE SIGNAL; ENVIRONMENTAL CONDITIONS; HIGH SENSITIVITY; LIMIT OF DETECTION; PARALLEL PLATES; RELATIVE HUMIDITIES; RESPONSE TIME CONSTANT; TEMPERATURE SENSITIVITY;

POLYIMIDES; SENSORS;

ATMOSPHERIC HUMIDITY;

EID: 79957953428     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065028     Document Type: Article

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