Development of a humidity microsensor with thermal reset

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 89-93

  Habib Ahsan, A H M ^a   Lange, C F ^a   Moussa, W ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Capacitive sensors; Delay; Dielectric substrates; Electrodes; Humans; Humidity measurement; Lungs; Microsensors; Process design; Thermal sensors

Indexed keywords

ELECTRODES; HEATING EQUIPMENT; HUMIDITY SENSORS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; NANOSENSORS; PROCESS DESIGN; RESPONSE TIME (COMPUTER SYSTEMS); SUBSTRATES;

DELAY; DIELECTRIC SUBSTRATES; HUMANS; HUMIDITY MEASUREMENTS; LUNGS; THERMAL SENSORS;

CAPACITIVE SENSORS;

EID: 84896880782     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1221971     Document Type: Conference Paper

References (9)

1. L. Baxter. Capacitive Microsensors, Design and Applications. IEEE Press, New York, 1997.
2. E. Daviskas, I. Gonda, and S. D. Anderson. Mathematical modeling of heat and water transport in human respiratory tract. J. Appl. Physio., 69:362-372,1990.
3. G. A. Ferron, B. Haider, and W. G. Kreyling. Inhalation of salt aerosol particles - I. Estimation of the temperature and relative humidity of the air in the human upper airways. J. Aerosol Sci., 19:343-363, 1988.
4. J. W. Gardner, V. K. Varadan, and O. O. Awadelkarim. Microsensor MEMS and Smart Devices. John Wiley & Sons, Ltd, England, 2002.
5. D. J. Griffiths. Introduction to Electrodynamics. Prentice Hall, USA, 3rd edition, 1999.
6. F. P. Incropera and D. P. DeWitt. Introduction to Heat Transfer. John Wiley & Sons, USA, 3rd edition, 1996.
7. U. Kang and K. D. Wise. A high-speed capacitive humidity sensor with on-chip thermal reset. IEEE Transaction on Electron Devices, 47:702-710, 2000.
8. E. R. McFadden, Jr., B. M. Pichurko, H. F. Bowman, E. Ingenito, S. Burns, N. Dowling, and J. Solway. Thermal mapping of the airways in humans. J. Appl. Physiol., 58(2):564-570, 1985.
9. J. Shake. Active Device Technologies: The RF and Microwave Handbook. CRC Press LLC, Boca Raton, electronic edition, 2001.