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ECS Transactions

Volumn 41, Issue 35, 2012, Pages 99-110

Nucleation and growth of copper on Ru-based substrates: II. The effect of the suppressor additive

(4) Nagar, M a,b Radisic, A a Strubbe, K b Vereecken, P M a,c

a IMEC (Belgium)

b GHENT UNIVERSITY (Belgium)

c UNIVERSITY OF LEUVEN (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

GALVANOSTATIC DEPOSITION; GALVANOSTATIC MEASUREMENT; GALVANOSTATIC METHODS; ISLAND DENSITY; NUCLEATION AND GROWTH; POLYETHYLENE GLYCOL (PEG); POTENTIAL-TIME;

COPPER; ELECTRODEPOSITION; METALLIZING; NANOSTRUCTURES; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

RUTHENIUM ALLOYS;

EID: 84864283108 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.3699384 Document Type: Conference Paper

Times cited : (8)

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