Thermophysical and electrical properties of Al-doped ZnO films

Journal of Applied Physics

Volumn 111, Issue 9, 2012, Pages

  Oka, Nobuto ^a   Kimura, Kentaro ^a   Yagi, Takashi ^b   Taketoshi, Naoyuki ^b   Baba, Tetsuya ^b   Shigesato, Yuzo ^a  

^a AOYAMA GAKUIN UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AL-DOPED ZNO; AZO FILMS; DC MAGNETRON SPUTTERING; ELECTRICAL CONDUCTIVITY; ELECTRICAL RESISTIVITY; HIGH DENSITY CERAMICS; METAL TARGET; SYNTHESIZED SILICA; THERMOPHYSICAL; THERMOREFLECTANCE; TRANSPARENT CONDUCTIVE OXIDE FILMS; ZNO;

CERAMIC MATERIALS; CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY; FILM PREPARATION; MOLYBDENUM; MONOLAYERS; OXIDE FILMS; SILICA; SINTERING; THERMAL DIFFUSIVITY; ZINC OXIDE;

ALUMINUM;

EID: 84864116623     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4706572     Document Type: Article

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