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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 11, 2000, Pages 6422-6426

Study on fluorine-doped indium oxide films deposited by rf magnetron sputtering

(5) Shigesato, Yuzo a Shin, Naoko a Kamei, Masayuki b Song, P K a Yasui, Itatu c

a AOYAMA GAKUIN UNIVERSITY (Japan)

b NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

c INSTITUTE OF INDUSTRIAL SCIENCE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DOPING (ADDITIVES); FLUORINE; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; MICROANALYSIS; SPUTTER DEPOSITION; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON PROBE MICROANALYSIS (EPMA);

CONDUCTIVE FILMS;

EID: 0034317513 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.39.6422 Document Type: Article

Times cited : (26)

References (16)

1
- 0001920389
- H. Koh, K. Sawada, M. Ohgawara, T. Kuwata, M. Akatsuka and M. Matsuhiro: SID Dig. Tech. Pap. 19 (1988) 53.
- (1988) SID Dig. Tech. Pap. , vol.19 , pp. 53
- Koh, H.¹ Sawada, K.² Ohgawara, M.³ Kuwata, T.⁴ Akatsuka, M.⁵ Matsuhiro, M.⁶

2
- 0041841443
- in Japanese
- T. Tsutsui: Oyo Buturi 66 (1997) 109 [in Japanese].
- (1997) Oyo Buturi , vol.66 , pp. 109
- Tsutsui, T.¹

3
- 33751520683
- H. Kobayashi, Y. Ishida, Y. Nakato and H. Tsubomura: J. Appl. Phys. 69 (1991) 1736.
- (1991) J. Appl. Phys. , vol.69 , pp. 1736
- Kobayashi, H.¹ Ishida, Y.² Nakato, Y.³ Tsubomura, H.⁴

4
- 36549099749
- I. Hamberg and C. G. Granqvist: J. Appl. Phys. 60 (1986) R123.
- (1986) J. Appl. Phys. , vol.60
- Hamberg, I.¹ Granqvist, C.G.²

5
- 0002175086
- Y. Shigesato, Y. Hayashi and T. Haranoh: Appl. Phys. Lett. 61 (1992) 73.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 73
- Shigesato, Y.¹ Hayashi, Y.² Haranoh, T.³

6
- 33751542936
- Y. Shigesato and D. C. Paine: Appl. Phys. Lett. 62 (1993) 1268.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 1268
- Shigesato, Y.¹ Paine, D.C.²

7
- 84903891800
- Y. Kanai: Jpn. J. Appl. Phys. 23 (1984) 127.
- (1984) Jpn. J. Appl. Phys. , vol.23 , pp. 127
- Kanai, Y.¹

8
- 0022717670
- T. M. Ratcheva, M. D. Nanova, L. V. Vassilev and M. G. Mikhailov: Thin Solid Films 139 (1986) 189.
- (1986) Thin Solid Films , vol.139 , pp. 189
- Ratcheva, T.M.¹ Nanova, M.D.² Vassilev, L.V.³ Mikhailov, M.G.⁴

9
- 0026189579
- T. M. Ratcheva, M. D. Nanova, L. Kinova and I. Penev: Thin Solid Films 202 (1991) 243.
- (1991) Thin Solid Films , vol.202 , pp. 243
- Ratcheva, T.M.¹ Nanova, M.D.² Kinova, L.³ Penev, I.⁴

10
- 0019545751
- J. N. Avaritsiotis and R. P. Howson: Thin Solid Films 77 (1981) 351.
- (1981) Thin Solid Films , vol.77 , pp. 351
- Avaritsiotis, J.N.¹ Howson, R.P.²

11
- 0019572753
- J. N. Avaritsiotis and R. P. Howson: Thin Solid Films 80 (1981) 63.
- (1981) Thin Solid Films , vol.80 , pp. 63
- Avaritsiotis, J.N.¹ Howson, R.P.²

12
- 0033349512
- P. K. Song, H. Akao, M. Kamei, Y. Shigesato and Y. Itaru: Jpn. J. Appl. Phys. 38 (1999) 5224.
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 5224
- Song, P.K.¹ Akao, H.² Kamei, M.³ Shigesato, Y.⁴ Itaru, Y.⁵

13
- 0032046806
- P. K. Song, Y. Shigesato, I. Yasui, C. W. Ow-Yang and D. C. Paine: Jpn. J. Appl. Phys. 37 (1998) 1870.
- (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 1870
- Song, P.K.¹ Shigesato, Y.² Yasui, I.³ Ow-Yang, C.W.⁴ Paine, D.C.⁵

14
- 0032626423
- P. K. Song, Y. Shigesalo, M. Kamei and I. Yasui: Jpn. J. Appl. Phys. 38 (1999) 2921.
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 2921
- Song, P.K.¹ Shigesalo, Y.² Kamei, M.³ Yasui, I.⁴

15
- 0000270429
- Y. Shigesato, D. C. Paine and T. E. Haynes: J. Appl. Phys. 73 (1993) 3805.
- (1993) J. Appl. Phys. , vol.73 , pp. 3805
- Shigesato, Y.¹ Paine, D.C.² Haynes, T.E.³

16
- 0003740393
- Academic, New York
- See, for example, F. Wooten: Optical Properties of Solids (Academic, New York, 1972).
- (1972) Optical Properties of Solids
- Wooten, F.¹

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