Effect of substrate temperature on structural and optical properties of Zinc Aluminum Oxide thin films prepared by DC reactive magnetron sputtering technique

Journal of Ovonic Research

Volumn 7, Issue 6, 2011, Pages 115-123

  Rajesh Kumar, B ^a,b   Subba Rao, T ^b  

^a SRI VENKATESWARA UNIVERSITY   (India)

^b SRI KRISHNADEVARAYA UNIVERSITY   (India)

Author keywords

DC magnetron sputtering; Optical parameters; Scanning electron microscope; Transmittance; ZAO thin films

Indexed keywords

EID: 84864104992     PISSN: 18422403     EISSN: 15849953     Source Type: Journal    
DOI: None     Document Type: Article

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