Organic and aqueous electrolytes used for etching macro- and mesoporous silicon

Physica Status Solidi (A) Applied Research

Volumn 197, Issue 1, 2003, Pages 34-38

  Christophersen, M ^a   Carstensen, J ^a   Voigt, K ^a   Foll H ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DISSOLUTION; ELECTROCHEMISTRY; ELECTROLYTES; ETCHING; HYDROFLUORIC ACID; MESOPOROUS MATERIALS; MORPHOLOGY; ORGANIC SOLVENTS; SCANNING ELECTRON MICROSCOPY; SILICA; SOLUTIONS;

ANODIC OXIDE; AQUEOUS ELECTROLYTE; MACROPOROUS SILICON; MESOPOROUS SILICON; ORGANIC ELECTROLYTE;

POROUS SILICON;

EID: 0038469969     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306464     Document Type: Conference Paper

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