Structure and mechanical properties of TiC films deposited using combination of pulsed DC and normal DC magnetron co-sputtering

Applied Surface Science

Volumn 258, Issue 22, 2012, Pages 8629-8635

  Raman, K H T ^a   Kiran, M S R N ^a   Ramamurty, U ^a   Rao, G Mohan ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Nanocomposite; Nanoindentation; Preferred orientation; Pulsed balanced magnetron; Titanium carbide

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; FRICTION; MAGNETRONS; MECHANICAL PROPERTIES; NANOCOMPOSITES; NANOINDENTATION; SCANNING ELECTRON MICROSCOPY; SILICON OXIDES; THIN FILMS; TITANIUM CARBIDE;

AMORPHOUS CARBON MATRIX; CROSS-SECTIONAL SCANNING; DC MAGNETRON CO-SPUTTERING; DEFORMATION PARAMETER; MAGNETRON CO-SPUTTERING; PREFERENTIAL ORIENTATION; PREFERRED ORIENTATIONS; RANDOMLY ORIENTED GRAINS;

CARBON FILMS;

EID: 84863525330     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.05.064     Document Type: Article

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