Fabrication of a uniform microlens array over a large area using self-aligned diffuser lithography (SADL)

Journal of Micromechanics and Microengineering

Volumn 22, Issue 4, 2012, Pages

  Kim, Hyeon Don ^a   Yoon, Gun Wook ^a   Yeon, Jeongho ^a   Lee, Joo Hyung ^a   Yoon, Jun Bo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

3D DIFFUSER LITHOGRAPHY; AIR-GAPS; FILL-FACTOR; LARGE SIZES; LASER SCANNING; METAL MASKS; MICROLENS ARRAYS; PLASTIC MATERIALS; POLYDIMETHYLSILOXANE PDMS; SELF-ALIGNED; STANDARD DEVIATION;

FABRICATION; MOLDS; OPTICAL INSTRUMENT LENSES; PHOTORESISTS; STATISTICS;

LITHOGRAPHY;

EID: 84863376925     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/4/045002     Document Type: Article

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