Innovative rapid replication of microlens arrays using electromagnetic force-assisted UV imprinting

Journal of Micromechanics and Microengineering

Volumn 19, Issue 2, 2009, Pages

  Wen, T T ^a   Hocheng, H ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; ELECTROMAGNETISM; MICROOPTICS; OPTICAL INSTRUMENT LENSES; OPTICAL MICROSCOPY; RESINS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

ELECTRO-MAGNETIC FORCES; FOCUSING FUNCTIONS; GLASS SUBSTRATES; HIGH PRODUCTIVITIES; INNOVATIVE METHODS; LOW COSTS; LOW PRESSURES; MICRO-LENS ARRAYS; OPTICAL OBSERVATIONS; PATTERN FIDELITIES; POLYMER MICROLENS ARRAYS; ROOM TEMPERATURES; SEM; SMOOTH SURFACES; UV EXPOSURES; UV IMPRINTINGS; UV-CURABLE;

MICROLENSES;

EID: 61849083117     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/2/025012     Document Type: Article

References (10)

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