Fast formation of conductive material by simultaneous chemical process for infilling through-silicon via

Japanese Journal of Applied Physics

Volumn 51, Issue 6 PART 2, 2012, Pages

  Kawakita, Jin ^a   Chikyow, Toyohiro ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL PROCESS; CONDUCTIVE COMPOSITES; FABRICATION PROCESS; INFILLING; LIQUID PHASE; METAL CONDUCTOR; PHOTO-IRRADIATION; REACTION CONDITIONS; SIMULTANEOUS DEPOSITION;

CONDUCTIVE MATERIALS; ELECTRIC CONDUCTIVITY; ELECTRIC WIRE; ELECTRIC WIRING; POLYPYRROLES;

ORGANIC POLYMERS;

EID: 84863326801     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.51.06FG11     Document Type: Article

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