Understanding of the retarded oxidation effects in silicon nanostructures

Applied Physics Letters

Volumn 100, Issue 26, 2012, Pages

  Krzeminski, C D ^a   Han, X L ^a   Larrieu, G ^b  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEX BEHAVIOR; IN-DEPTH UNDERSTANDING; MECHANICAL STRESS; OXIDATION EFFECTS; OXIDATION KINETICS; OXIDATION PROCESS; PHYSICAL STRESS; RELAXATION EFFECT; SILICON NANOSTRUCTURES; SILICON NANOWIRES; WET THERMAL OXIDATIONS;

NANORINGS; NANOWIRES; OXIDATION; STRESSES;

SILICON OXIDES;

EID: 84863301290     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4729410     Document Type: Article

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