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Journal of Applied Physics

Volumn 111, Issue 3, 2012, Pages

Self-organized ZnO nanodot arrays: Effective control using SiN x interlayers and low-temperature plasmas

(8) Huang, S Y a Cheng, Q J b,c Xu, S a Wei, D Y a Zhou, H P a Long, J D d Levchenko, I b,c Ostrikov, K b,c

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b CSIRO (Australia)

c UNIVERSITY OF SYDNEY (Australia)

d NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EXPERIMENTAL PARAMETERS; LOW TEMPERATURE PLASMAS; NANO-DOT ARRAYS; NANODOTS; NANOLASERS; OTHER APPLICATIONS; PHOTO-LUMINESCENT PROPERTIES; REGULAR ARRAY; RF-MAGNETRON SPUTTERING; SILICON SUBSTRATES; ZNO;

INDUCTIVELY COUPLED PLASMA; LIGHT EMITTING DIODES; MAGNETRON SPUTTERING; SILICON NITRIDE;

ZINC OXIDE;

EID: 84863170139 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3673593 Document Type: Article

Times cited : (46)

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