Properties of TiN/TiCN multilayer films by direct current magnetron sputtering

Journal of Physics D: Applied Physics

Volumn 45, Issue 9, 2012, Pages

  Zheng, Jianyun ^a,b   Hao, Junying ^a   Liu, Xiaoqiang ^a,b   Liu, Weimin ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION FORCES; AMORPHOUS CARBON (A-C); BI-LAYER; COEFFICIENT OF FRICTIONS; COLUMNAR STRUCTURES; CRYSTALLINE STRUCTURE; DIRECT CURRENT MAGNETRON SPUTTERING; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; INNER STRUCTURE; MULTILAYER THICK FILMS; NANOINDENTATION TESTS; SCRATCH TEST; STEEL BALLS; TIN LAYERS; TRIBOLOGICAL BEHAVIOUR; WEAR RATES;

ADHESION; AMORPHOUS CARBON; FIELD EMISSION MICROSCOPES; RAMAN SPECTROSCOPY; SILICON; THICK FILMS; TITANIUM NITRIDE; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTILAYER FILMS;

EID: 84863167728     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/9/095303     Document Type: Article

References (39)

1. Abadias G 2008 Stress and preferred orientation in nitride-based PVD coatings Surf. Coat. Technol. 202 222335 (Pubitemid 351211134)
2. Agudelo L C, Ospina R, Castillo H A and Devia A 2008 Synthesis of Ti/TiN/TiCN coatings grown in graded form by sputtering dc 014006 Phys. Scr.
3. Antunes R A, Rodas A C D, Lima N B, Higa O Z and Costa I 2010 Study of the corrosion resistance and in vitro biocompatibility of PVD TiCN-coated AISI 316L austenitic stainless steel for orthopedic applications Surf. Coat. Technol. 205 207481
4. Barshilia H C, Surya Prakash M, Jain A and Rajam K S 2005 Structure, hardness and thermal stability of TiAlN and nanolayered TiAlN/CrN multilayer films Vacuum 77 16979
5. Bemporad E, Peechio C, De Rossi S and Carassiti E 2001 Characterization and hardness modelling of alternate TiN/TiCN multilayer cathodic arc PVD coating on tool steel Surf. Coat. Technol. 146 36370 (Pubitemid 34018623)
6. Caicedo J C, Amaya C, Yate L, Gmez M E, Zambrano G, Alvarado-Rivera J, Muoz-Saldaa J and Prieto P 2010 TiCN/TiNbCN multilayer coatings with enhanced mechanical properties Appl. Surf. Sci. 256 5898904
7. 1xN/CrN coatings synthesized by a cathodic-arc deposition process Surf. Coat. Technol. 204 10304
8. 4 fraction on the composition, structure, and internal stress of the TiCN coatings deposited by LAFAD technique Vacuum 85 8994
9. x hard coatings Wear 265 52532
10. Escobar-Alarcn L, Camps E, Romero S, Muhl S, Camps I and Haro-Poniatowski E 2010 TiCN thin films grown by reactive crossed beam pulsed laser deposition Appl. Phys. A 101 7715
11. Foerster C E, Serbena F C, da Silva S L R, Lepienski C M, Siqueira C and Ueda M 2007 Mechanical and tribological properties of AISI 304 stainless steel nitrided by glow discharge compared to ion implantation and plasma immersion ion implantation Nucl. Instrum. Methods B 257 7326 (Pubitemid 46498303)
12. Graca S, Carvalho P A and Colaco R 2011 Dislocation structures in nanoindented ductile metalsa transmission electron microscopy direct observation J. Phys. D: Appl. Phys. 44 35402
13. x and nc-TiCN/a-SiCN coatings deposited on 410 low alloy stainless steel Surf. Coat. Technol. 203 290511
14. Huang S W, Ng M W, Samandi M and Brandt M 2002 Tribological behaviour and microstructure of TiC(x)N((1-x)) coatings deposited by filtered arc Wear 252 56679 (Pubitemid 34553995)
15. Irmer G and Dorner-Reisel A 2005 Micro-Raman studies on DLC coatings Adv. Eng. Mater. 7 694705 (Pubitemid 41353035)
16. Jiang J L, Hao J Y, Pang X J, Wang P and Liu W M 2010 Structure and characteristics of amorphous (Ti,Si)-C:H films deposited by reactive magnetron sputtering Diamond Relat. Mater. 19 11727
17. Kester D J, Brodbeck C L, Singer I L and Kyriakopoulos A 1999 Sliding wear behavior of diamond-like nanocomposite coatings Surf. Coat. Technol. 113 26873 (Pubitemid 29375535)
18. Kim G S, Lee S Y, Hahn J H, Lee B Y, Han J G, Lee J H and Lee S Y 2003a Effects of the thickness of Ti buffer layer on the mechanical properties of TiN coatings Surf. Coat. Technol. 171 8390 (Pubitemid 36689497)
19. Kim G S, Lee S Y, Hahn J H and Lee S Y 2003b Synthesis of CrN/AlN superlattice coatings using closed-field unbalanced magnetron sputtering process 915 Surf. Coat. Technol.
20. 4 and TiCN/a-SiCN coatings produced by PECVD J. Superhard Mater. 29 14752
21. Klug H P and Alexander L E 1974 X-Ray Diffraction Procedures: For Polycrystalline and Amorphous Materials (New York: Wiley-Interscience)
22. Louw C W, Strydom I L and van den Heever K 1991 Selective steam oxidation of titanium and aluminium in TiN and (Ti, Al)N physically vapour-deposited coatings on dental surgical tools Surf. Coat. Technol. 49 34852
23. Meng J, Lu J, Wang J and Yang S 2006 Tribological behavior of TiCN-based cermets at elevated temperatures Mater. Sci. Eng. A 418 6876 (Pubitemid 43216108)
24. Miao Q, Cui C E and Pan J D 2007 CrNTiN multilayer coating on magnesium alloy AZ91 by arc-glow plasma deposition process Surf. Coat. Technol. 201 507780 (Pubitemid 46158550)
25. Monaghan D P, Teer D G, Laing K C, Efeoglu I and Arnell R D 1993 Deposition of graded alloy nitride films by closed field unbalanced magnetron sputtering Surf. Coat. Technol. 59 215
26. Morant C, Prieto P, Forn A, Picas J A, Elizalde E and Sanz J M 2004 Hardness enchancement by CN/TiCN/TiN multilayer films Surf. Coat. Technol. 180181 5128 (Pubitemid 38473622)
27. Ogwu A A, Lamberton R W, Maguire P D and McLaughlin J A 1999 The effect of the substrate bias on the Raman spectra and thermal stability of diamond-like carbon (DLC) and silicon-modified DLC films prepared by plasma-enhanced chemical vapour deposition (PECVD) J. Phys. D: Appl. Phys. 32 9817
28. Oh S M, Rhee B G and Jeong B S 2003 Wear behaviors of ceramics TiN, TiC and TiCN with arc ion plating KSME Int. J. 17 190411
29. Peters A M and Nastasi M 2002 Effect of carrier gas on the deposition of titanium carbo-nitride coatings by a novel organo-metallic plasma immersion ion processing technique Vacuum 67 16975 (Pubitemid 35000275)
30. Polcar T, Martinez R, Vt T, Kopeck L, Rodriguez R and Cavaleiro A 2009 High temperature tribology of CrN and multilayered Cr/CrN coatings Surf. Coat. Technol. 203 32549
31. Qi Z, Sun P and Wang Z 2010 Proc. Int. Conf. on Technical Sessions (Beijing, China,) (Berlin: Springer) pp 796800
32. Raveh A, Zukerman I, Kalman H, Klemberg-Sapieha J E and Martinu L 2007 Thermal stability and wear resistance of hard TiN/TiCN coatings on plasma nitrided PH15-5 steel Wear 263 124952 (Pubitemid 47299119)
33. Serro A P, Completo C, Cola̧o R, dos Santos F, da Silva C L, Cabral J M S, Arajo H, Pires E and Saramago B 2009 A comparative study of titanium nitrides, TiN, TiNbN and TiCN, as coatings for biomedical applications Surf. Coat. Technol. 203 37017
34. Shi Y L, Peng H R, Xie Y, Xie G W, Zhao C and Li S Z 2000 Plasma CVD of hard coatings Ti(CNO) using metallo-organic compound Ti(OC3H7)(4) Surf. Coat. Technol. 132 2630
35. Stanishevsky A and Lappalainen R 2000 Tribological properties of composite Ti(N,O,C) coatings containing hard amorphous carbon layers Surf. Coat. Technol. 123 1015
36. Su Y L and Kao W H 2001 Tribological behavior and wear mechanisms of Ti-C:H/TiC/TiCN/TiN/Ti coatings when sliding against steel, bronze and aluminum alloy rods J. Mater. Sci. 36 18999 (Pubitemid 32134423)
37. Tu J P, Chen R, Liu D G, Mai Y J and Gu C D 2011 Microstructure, mechanical and tribological properties of TiCN nanocomposite films deposited by dc magnetron sputtering Surf. Coat. Technol. 205 522834
38. 0.13 alloy Wear 268 9915
39. Zukerman I, Raveh A, Landau Y, Weiss R, Shneck R, Shneor Y, Kalman H, Klembergsaphieha J and Martinu L 2007 Tribological properties of duplex treated TiN/TiCN coatings on plasma nitrided PH15-5 steel Surf. Coat. Technol. 201 61715 (Pubitemid 46209938)