Nickel electroplating for nanostructure mold fabrication

Journal of Nanoscience and Nanotechnology

Volumn 11, Issue 8, 2011, Pages 7006-7010

  Lin, Xiaohui ^a   Dou, Xinyuan ^a   Wang, Xiaolong ^b   Chen, Ray T ^a  

^a The University of Texas at Austin   (United States)

^b OMEGA OPTICS INC   (United States)

Author keywords

Electron beam lithography; Nanostructure; Nickel electroplating

Indexed keywords

ELECTROPLATING PROCESS; LOW COSTS; MOLD FABRICATION; NANO SCALE; NANO-IMPRINTING; NANOIMPRINT MOLDS; NICKEL ELECTROPLATING; PATTERN STRUCTURE; PRACTICAL PROCESS;

ELECTRON BEAM LITHOGRAPHY; MOLDS; NANOSTRUCTURES; NICKEL; PHOTONIC CRYSTALS;

ELECTROPLATING;

EID: 84863049757     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2011.4236     Document Type: Conference Paper

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