Fabrication of low loss and high speed silicon optical modulator using doping compensation method

Optics Express

Volumn 19, Issue 19, 2011, Pages 18029-18035

  Tu, Xiaoguang ^a   Liow, Tsung Yang ^a   Song, Junfeng ^a   Yu, Mingbin ^a   QiangLo, Guo ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; EFFICIENCY; LIGHT MODULATORS; LITHIUM; NIOBIUM COMPOUNDS; OPTIMIZATION; PHASE SHIFT; PHASE SHIFTERS;

COMPENSATION METHOD; CROSS SECTION; DEPLETION REGION; DOPING LEVELS; DOPING METHODS; DOPING PROFILES; LITHIUM NIOBATE; LOW LOSS; MODULATION EFFICIENCY; PHASE SHIFTER LOSS; SILICON MODULATORS; SMALL SIGNAL; SWITCHING SPEED; TOTAL LOSS;

LOSSES;

EID: 80052748477     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.018029     Document Type: Article

References (14)

1. L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, "Electronic-photonic integrated circuits on the CMOS platform," Proc. SPIE 6125, 612502-10 (2006).
2. M. Paniccia, "Integrating silicon photonics," Nat. Photonics 4(8), 498-499 (2010).
3. G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, "Silicon optical modulators," Nat. Photonics 4(8), 518-526 (2010).
4. J. Michel, J. F. Liu, and L. C. Kimerling, "High performance Ge-on-Si photodetectors," Nat. Photonics 4(8), 527-534 (2010).
5. R. A. Soref and B. R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron. 23(1), 123-129 (1987).
6. S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, "Simulation studies of silicon electro-optic waveguide decices," J. Appl. Phys. 68(10), 4964-4970 (1990).
7. J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, "Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms," Adv. Opt. Technol. 2008, 678948 (2008).
8. T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, "Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization," IEEE J. Sel. Top. Quantum Electron. 16(1), 307-315 (2010).
9. πL integrated on 0.25μ m silicon-on-insulator waveguides," Opt. Express 18(8), 7994-7999 (2010).
10. D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, "Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure," Opt. Express 16(1), 334-339 (2008).
11. G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, "Performance evolutions of carrier depletion silicon optical modulators: From p-n to p-i-p-i-n diodes," IEEE J. Quantum Electron. 16(1), 179-184 (2010).
12. U. Littmark and J. F. Ziegler, "Ranges of energetic ions in matter," Phys. Rev. A 23(1), 64-72 (1981).
13. Q. Fang, T. Y. Liow, J. F. Song, C. W. Tan, M. B. Yu, G. Q. Lo, and D. L. Kwong, "Suspended optical fiber-to-waveguide mode size converter for silicon photonics," Opt. Express 18(8), 7763-7769 (2010).
14. X. Tu, S. Chen, L. Zhao, F. Sun, J. Yu, and Q. Wang, "A high performance Si based MOS electrooptic phase modulator with a shunt capacitor configuration," J. Lightwave Technol. 24(2), 1000-1007 (2006).