Research on the micro gas sensor test system based on constant gas-distribution method

Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument

Volumn 32, Issue 12, 2011, Pages 2681-2687

  Zhu, Bin ^a   Yin, Chenbo ^a   Tao, Chunmin ^a   Zhang, Zili ^a  

^a NANJING TECH UNIVERSITY   (China)

Author keywords

Constant gas distribution; Gas test system; Humidification device; Reaction chamber

Indexed keywords

GAS DISTRIBUTION; GAS SATURATIONS; GAS SENSING MATERIAL; HUMIDIFICATION DEVICE; HYDROGEN ADSORPTION; HYDROGEN SENSITIVITY; MICRO-GAS SENSORS; REACTION CHAMBERS; RECOVERY TIME; SOFTWARE CONTROL; THEORETICAL FORMULA;

GAS ADSORPTION; GAS DETECTORS; GASES; HYDROGEN; SENSORS; SOFTWARE DESIGN; SOFTWARE TESTING; TESTING;

PHASE INTERFACES;

EID: 84862959427     PISSN: 02543087     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)

1. VLADIMIR A. Metal oxide hydrogen, oxygen, and carbon monoxide sensors for hydrogen setups and cells[J]. International Journal of Hydrogen Energy, 2007, 32(9): 1145-1158.
2. BARSAN N, KOZIEJ D, WEIMAR U. Metal oxide-based gas sensor research: How to[J]. Sensors and Actuators B, 2007, 121: 18-35.
3. ADAMYAN A Z, ADAMYAN Z N, AROUTIOUNIAN V M, et al. Sol-gel derived thin-film semiconductor hydrogen gas sensor[J]. J. Hydrogen Energy, 2007, 32(16): 4101-4108.
4. YAMAZOE N, SHIMANOE K. New perspectives of gas sensor technology[J]. Sensors and Actuators B, 2009, 138(1): 100-107.
5. YAMAZOE N, SHIMANOE K. Theory of power laws for semiconductor gas sensors[J]. Sensors and Actuators B, 2008, 128(2): 566-573.
6. GUO H H, CHEN X D, DU G T, et al. Study on novel formaldehyde vapor sensor based on Si bridge[J]. Chinese Journal of Scientific Instrument, 2011, 32(1): 138-143.
7. WANG CH L, ZHU ZH D. Fabrication and sensitivity test of multi-film gas sensor[J]. Chinese Journal of Scientific Instrument, 2009, 30(7): 1395-1399.
8. LI P X, HAO Y. Gas supply system for growth of high quality InGaN/GaN multi-quantum-wells by metal organic chemical vapor deposition[J]. Chinese Journal of Vacuum Science and Technology, 2006, 26(4): 313-316.
9. ENDRES H E, JANDER H D, GÖTTLER W. A test system for gas sensors[J]. Sensors and Acturators B, 1995, 23(2-3): 163-172.
10. KENNEDY M K, KRUIS F E, FISSAN H. Fully automated, gas sensing, and electronic parameter measurement setup for miniaturized nanoparticle gas sensors[J]. Review of Scientific Instruments, 2003, 74(3): 4908-4915.
11. SALYK O, CASTELLO P, HARSKAMP F. A facility for characterization and testing of Hydrogen sensors[J]. Measurement Science and Technology, 2006, 17: 3033-3041.
12. YIN CH B, ZHU B, TAO CH M, et al. Gas sensing materials measurement device: China, ZL200920256712.4[P]. 2010.
13. GUO L P, TIAN SH L, JIANG J, et al. Research on the trigger point synchronizing technology of ultra-high-speed data acquisition system[J]. Journal of Electronic Measurement and Instrument, 2010, 24(3): 224-229.
14. GENG G L, BIE H X. Automatic measurement system for super high resistance based on LabVIEW[J]. Journal of Electronic Measurement and Instrument, 2009, 23(3): 70-75.
15. ZHANG H, LI W H. Analysis research of undercutting phenomenon in wet anisotropic etching process[J]. Chinese Journal of Scientific Instrument, 2010, 31(4): 944-950.