New perspectives of gas sensor technology

Sensors and Actuators, B: Chemical

Volumn 138, Issue 1, 2009, Pages 100-107

  Yamazoe, Noboru ^a   Shimanoe, Kengo ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Depletion; Gas sensor; MEMS; Oxide; Receptor; Semiconductor

Indexed keywords

ELECTRIC CONDUCTIVITY; GAS DETECTORS; GASES; MEMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR MATERIALS;

DEPLETION; FUNDAMENTAL THEORIES; GAS SENSOR; GAS SENSOR TECHNOLOGIES; INNOVATIVE FUNCTIONS; RECEPTOR; SEMICONDUCTOR; SEMICONDUCTOR GAS SENSORS;

CHEMICAL SENSORS;

EID: 63749111316     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.01.023     Document Type: Article

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