Gas supply system for growth of high quality InGaN/GaN multi-quantum-wells by metal organic chemical vapor deposition

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

Volumn 26, Issue 4, 2006, Pages 313-316

  Li, Peixian ^a   Hao, Yue ^a  

^a XIDIAN UNIVERSITY   (China)

Author keywords

Gas supply system; MOCVD; MQWs

Indexed keywords

GAS SUPPLY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING INDIUM COMPOUNDS;

GAS SUPPLY SYSTEM;

SEMICONDUCTOR QUANTUM WELLS;

EID: 33750414139     PISSN: 16727126     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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