Study on novel formaldehyde vapor sensor based on Si bridge

Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument

Volumn 32, Issue 1, 2011, Pages 138-143

  Guo, Huihui ^a   Chen, Xiangdong ^a   Du, Guangtao ^a   Yao, Yao ^a   Li, Hui ^a  

^a SOUTHWEST JIAOTONG UNIVERSITY   (China)

Author keywords

Formaldehyde vapor sensor; MEMS; Modified acrylic adhesive; Si bridge; Swelling effect

Indexed keywords

ACRYLIC ADHESIVES; ELASTIC MECHANICS THEORY; FORMALDEHYDE VAPORS; GAS SENSORS; LOW COSTS; MEMS PROCESS; MODIFIED ACRYLIC ADHESIVE; OUTPUT VOLTAGES; PIEZO-RESISTIVE; POLYMER LAYERS; RECOVERY TIME; RESPONSE TIME; SI BRIDGE; SIGNAL PROCESSING CIRCUITS; SILICON-BRIDGE; SWELLING EFFECT; THEORETICAL MODELS; THIN POLYMER LAYERS; WHEATSTONE BRIDGES;

BRIDGE CIRCUITS; FORMALDEHYDE; POLYMERS; SENSORS; SIGNAL PROCESSING; SILICON; SWELLING; VAPORS;

CABLE STAYED BRIDGES;

EID: 79953125006     PISSN: 02543087     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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