Analysis research of undercutting phenomenon in wet anisotropic etching process

Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument

Volumn 31, Issue 4, 2010, Pages 944-950

  Zhang, Han ^a   Li, Weihua ^a  

^a Southeast University   (China)

Author keywords

Convex corner undercutting; Experimental verification; Theoretical analysis; Wet anisotropic etching

Indexed keywords

ANALYSIS METHOD; ANALYSIS PROCESS; CONVEX CORNERS; DIRECTIVITY; ETCHING PROCESS; ETCHING RATE; EXPERIMENTAL VERIFICATION; RELATIVE POSITIONS; SILICON SUBSTRATES; SIMULATION RESULT; WET ANISOTROPIC ETCHING;

ANISOTROPY; WET ETCHING;

ANISOTROPIC ETCHING;

EID: 77953246417     PISSN: 02543087     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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