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Volumn 30, Issue 7, 2009, Pages 1395-1399
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Fabrication and sensitivity test of multi-film gas sensor
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Author keywords
Magnetron sputtering; Multi film; Powder metallurgic SnO2 sensor
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Indexed keywords
COMPLEX FILMS;
CROSS SENSITIVITY;
GAS SENSORS;
HIGH ENERGY CONSUMPTION;
MULTI-FILM;
RESISTANCE FILMS;
RF MAGNETRON SPUTTERING METHOD;
SENSITIVITY TESTS;
THERMAL COUPLE;
TIO;
WORKING TEMPERATURES;
ZNO;
CHEMICAL SENSORS;
CHROMIUM;
DESORPTION;
GAS DETECTORS;
MAGNETRON SPUTTERING;
MAGNETRONS;
METALLURGY;
OXIDE MINERALS;
POWDERS;
QUARTZ;
ZINC OXIDE;
GAS ABSORPTION;
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EID: 69249235527
PISSN: 02543087
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (4)
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References (10)
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