Bottom-up SiO 2 embedded carbon nanotube electrodes with superior performance for integration in implantable neural microsystems

ACS Nano

Volumn 6, Issue 6, 2012, Pages 4615-4628

  Musa, Silke ^a,b   Rand, Danielle R ^a   Cott, Daire J ^a   Loo, Josine ^a   Bartic, Carmen ^a,b   Eberle, Wolfgang ^a   Nuttin, Bart ^b   Borghs, Gustaaf ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

bottom up SiO 2 embedding; brain insertion; charge injection; CNT electrodes; electrode impedance; neural probes

Indexed keywords

BOTTOM-UP SIO 2 EMBEDDING; CARBON NANOTUBE ELECTRODES; CHEMICAL FINGERPRINT; CMOS PROCESSING; CURRENT PULSE; CURRENT PULSING; ELECTRODE IMPEDANCE; GAS EVOLUTION; IMPEDANCE MONITORING; LOW TEMPERATURES; MECHANICAL INTEGRITY; MICROELECTRODE ARRAY; NEURAL MICROSYSTEMS; NEURAL PROBES; PARYLENE C; RAT BRAIN; TIN ELECTRODES; VERTICALLY ALIGNED; WAFER-SCALE;

CHARGE INJECTION; CHEMICAL VAPOR DEPOSITION; CYCLIC VOLTAMMETRY; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; HYDROFLUORIC ACID; INFRARED SPECTROSCOPY; MICROELECTRODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLATINUM; PROBES; TITANIUM NITRIDE;

CARBON NANOTUBES;

BIOMATERIAL; CARBON NANOTUBE; SILICON DIOXIDE;

ANIMAL; ARTICLE; BRAIN; CHEMISTRY; ELECTRIC CONDUCTIVITY; ELECTRODE IMPLANT; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS TESTING; MICROELECTRODE; NANOTECHNOLOGY; NERVE CELL; PHYSIOLOGY; RAT; SPRAGUE DAWLEY RAT; SYSTEM ANALYSIS; ULTRASTRUCTURE;

ANIMALS; BRAIN; COATED MATERIALS, BIOCOMPATIBLE; ELECTRIC CONDUCTIVITY; ELECTRODES, IMPLANTED; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MICROELECTRODES; MINIATURIZATION; NANOTECHNOLOGY; NANOTUBES, CARBON; NEURONS; RATS; RATS, SPRAGUE-DAWLEY; SILICON DIOXIDE; SYSTEMS INTEGRATION;

EID: 84862896126     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn201609u     Document Type: Article

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