Electroplate and lift lithography for patterned micro/nanowires using ultrananocrystalline diamond (UNCD) as a reusable template

ACS Applied Materials and Interfaces

Volumn 3, Issue 4, 2011, Pages 925-930

  Seley, David B ^a   Dissing, Daniel A ^a   Sumant, Anirudha V ^b   Divan, Ralu ^b   Miller, Suzanne ^b   Auciello, Orlando ^b   Lepak, Lori A ^a   Terrell, Eric A ^a   Shogren, Tyler J ^a   Fahrner, Daryl A ^a   Hamilton, James P ^c   Zach, Michael P ^a  

^a UNIVERSITY OF WISCONSIN STEVENS POINT   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF WISCONSIN PLATTEVILLE   (United States)

Author keywords

electrochemically deposited semiconductors; electrode patterning; metamaterials; nontraditional lithography; patterned nanowires; UNCD films

Indexed keywords

COMPLEX PATTERN; ELECTROCHEMICAL SYNTHESIS; ELECTROCHEMICALLY DEPOSITED SEMICONDUCTORS; NANO SCALE; NONTRADITIONAL LITHOGRAPHY; PATTERNED NANOWIRES; REUSABLE TEMPLATES; SCALE DEVELOPMENT; SEMICONDUCTING NANOWIRES; ULTRANANOCRYSTALLINE DIAMONDS; UNCD FILMS;

ELECTRODEPOSITION; INDOOR AIR POLLUTION; LITHOGRAPHY; METAMATERIALS; SYNTHETIC DIAMONDS;

NANOWIRES;

EID: 84862833417     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am101226w     Document Type: Article

References (31)

1. Xia, Y. N.; Yang, P. D.; Sun, Y. G.; Wu, Y. Y.; Mayers, B.; Gates, B.; Yin, Y. D.; Kim, F.; Yan, Y. Q. Adv. Mater. 2003, 15, 353-389
2. Mieszawska, A. J.; Jalilian, R.; Sumanasekera, G. U.; Zamborini, F. P. Small 2007, 3, 722-756
3. Gates, B. D.; Xu, Q. B.; Love, J. C.; Wolfe, D. B.; Whitesides, G. M. Ann. Rev. Mater. Res. 2004, 34, 339-372
4. Gates, B. D.; Xu, Q. B.; Stewart, M.; Ryan, D.; Willson, C. G.; Whitesides, G. M. Chem. Rev. 2005, 105, 1171-1196
5. Keating, C. D.; Natan, M. J. Adv. Mater. 2003, 15, 451-454
6. Martin, C. R. Adv. Mater. 1991, 3, 457-459
7. Busbee, B. D.; Obare, S. O.; Murphy, C. J. Adv. Mater. 2003, 15, 414-416
8. Murphy, C. J.; San, T. K.; Gole, A. M.; Orendorff, C. J.; Gao, J. X.; Gou, L.; Hunyadi, S. E.; Li, T. J. Phys. Chem. B 2005, 109, 13857-13870
9. Natelson, D.; Willett, R. L.; West, K. W.; Pfeiffer, L. N. Appl. Phys. Lett. 2000, 77, 1991-1993
10. McLellan, J. M.; Geissler, M.; Xia, Y. N. J. Am. Chem. Soc. 2004, 126, 10830-10831
11. Chai, J.; Buriak, J. M. ACS Nano 2008, 2, 489-501
12. Calvert, J. M. J. Vac. Sci. Technol. B 1993, 11, 2155-2163
13. Piner, R. D.; Zhu, J.; Xu, F.; Hong, S. H.; Mirkin, C. A. Science 1999, 283, 661-663
14. Henzie, J.; Barton, J. E.; Stender, C. L.; Odom, T. W. Acc. Chem. Res. 2006, 39, 249-257
15. Jeon, N. L.; Lin, W. B.; Erhardt, M. K.; Girolami, G. S.; Nuzzo, R. G. Langmuir 1997, 13, 3833-3838
16. Kumar, A.; Biebuyck, H. A.; Abbott, N. L.; Whitesides, G. M. J. Am. Chem. Soc. 1992, 114, 9188-9189
17. Zaumseil, J.; Meitl, M. A.; Hsu, J. W. P.; Acharya, B. R.; Baldwin, K. W.; Loo, Y. L.; Rogers, J. A. Nano Lett. 2003, 3, 1223-1227
18. Heath, J. R. Acc. Chem. Res. 2008, 41, 1609-1617
19. Menke, E. J.; Thompson, M. A.; Xiang, C.; Yang, L. C.; Penner, R. M. Nat. Mater. 2006, 5, 914
20. Bhattacharyya, S.; Auciello, O.; Birrell, J.; Carlisle, J. A.; Curtiss, L. A.; Goyette, A. N.; Gruen, D. M.; Krauss, A. R.; Schlueter, J.; Sumant, A. Appl. Phys. Lett. 2001, 79, 1441-1443
21. Birrell, J.; Gerbi, J. E.; Auciello, O.; Gibson, J. M.; Gruen, D. M.; Carlisle, J. A. J. Appl. Phys. 2003, 93, 5606-5612
22. Gerbi, J. E.; Auciello, O.; Birrell, J.; Gruen, D. M.; Alphenaar, B. W.; Carlisle, J. A. Appl. Phys. Lett. 2003, 83, 2001-2003
23. Auciello, O.; Birrell, J.; Carlisle, J. A.; Gerbi, J. E.; Xiao, X. C.; Peng, B.; Espinosa, H. D. J. Phys.: Condens. Matter 2004, 16, R539-R552
24. Krauss, A. R.; Auciello, O.; Gruen, D. M.; Jayatissa, A.; Sumant, A.; Tucek, J.; Mancini, D. C.; Moldovan, N.; Erdemir, A.; Ersoy, D. Diamond Relat. Mater. 2001, 10, 1952-1961
25. Adiga, V. P.; Sumant, A. V.; Suresh, S.; Gudeman, C.; Auciello, O.; Carlisle, J. A.; Carpick, R. W. Phys. Rev. B 2009, 79 (245-403) 1-8
26. Sumant, A. V.; Auciello, O.; Yuan, H.-C.; Ma, Z.; Carpick, R. W.; Mancini, D. C. Proc. SPIE 2009, 7318 (17) 1-7
27. Zach, M. P.; Ng, K. H.; Penner, R. M. Science 2000, 290, 2120-2123
28. Endres, F. Chemphyschem 2002, 3, 144-154
29. Schaltin, S.; Nockemann, P.; Thijs, B.; Binnemans, K.; Fransaer, J. Electrochem. Solid-State Lett. 2007, 10, D104-D107
30. Sumant, A. V.; Grierson, D. S.; Gerbi, J. E.; Carlisle, J.; Auciello, O.; Carpick, R. W. Phys. Rev. B 2007, 76 (235429) 1-11
31. Zach, M. P. Proceedings of NSF Engineering Research and Innovation Conference; Atlanta, GA; NSF CMMI Program: Washington, D.C., 2011; Grant 0954656. Portions of the literature review were adapted from the NSF conference proceedings.