Fabrication of elastomeric high-aspect-ratio microstructures using polydimethylsiloxane (PDMS) double casting technique

Sensors and Actuators, A: Physical

Volumn 178, Issue , 2012, Pages 230-236

  Shao, Guocheng ^a   Wu, Jiahao ^a   Cai, Ziliang ^a   Wang, Wanjun ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Double casting; High aspect ratio; Microfluidics; Polydimethylsiloxane (PDMS)

Indexed keywords

CASTING TECHNIQUES; CORONA DISCHARGES; HIGH ASPECT RATIO; HIGH ASPECT RATIO MICROSTRUCTURES; HIGH FIDELITY; MASTER MOLDS; MOLDING PROCESS; PDMS REPLICA; POLYDIMETHYLSILOXANE (PDMS); SOFT LITHOGRAPHY; SURFACE MODIFICATION PROCESS; WHOLE PROCESS;

ASPECT RATIO; ELECTRIC CORONA; FABRICATION; LITHOGRAPHY; MICROCHANNELS; MICROFLUIDICS; MICROSTRUCTURE; MOLDING; MOLDS;

SILICONES;

EID: 84862812891     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.01.034     Document Type: Article

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