Fast replication of out-of-plane microlens with polydimethylsiloxane and curable polymer (NOA73)

Microsystem Technologies

Volumn 16, Issue 8-9, 2010, Pages 1471-1477

  Shao, Guocheng ^a   Qiu, Weiping ^a   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEMS; CURABLE POLYMERS; ELECTRO-MECHANICAL; FOCAL LENGTHS; IN-BUILDINGS; IN-PLANE; MICRO-LENS; MICRO-OPTIC SYSTEMS; NUMERICAL APERTURE; OUT-OF-PLANE MICROLENS; PDMS MOLDS; POLYDIMETHYLSILOXANE PDMS; REPLICATION PROCESS; REPLICATION TECHNOLOGY; SCANNING ELECTRON MICROSCOPIC; SOFT LITHOGRAPHY; SPECTRAL TRANSMISSION; SU-8 POLYMER; ULTRA VIOLET; UV CURABLE POLYMER; UV LITHOGRAPHY;

CURING; FABRICATION; LITHOGRAPHY; MICROCHANNELS; MOLDS; ORGANIC POLYMERS; POLYMERS; REFRACTIVE INDEX; SILICONES;

MICROLENSES;

EID: 77955847717     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-1010-3     Document Type: Conference Paper

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